Indium tin oxide (ITO) thin film gas sensor for detection of methanol at room temperature

Sensors and Actuators, B: Chemical

Volumn 96, Issue 1-2, 2003, Pages 180-189

  Patel, N G ^a   Patel, P D ^b   Vaishnav, V S ^b  

^a UNIVERSITY OF NORTH FLORIDA   (United States)

^b SARDAR PATEL UNIVERSITY   (India)

Author keywords

Indium tin oxide; Methanol; Thin films gas sensors

Indexed keywords

ALUMINA; CHEMICAL SENSORS; CRYSTALLIZATION; EVAPORATION; MAGNETRON SPUTTERING; METHANOL; THIN FILMS;

DIRECT EVAPORATION METHOD; NOBEL METALS;

INDIUM COMPOUNDS;

EID: 0242489214     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(03)00524-0     Document Type: Article

References (21)

1. N. Yamazoe, N. Miura, Chemical Sensor Technology, vol. 4, Elsevier, Amsterdam, 1992, pp. 19-42.
2. De Wit M., Vanneste E., Geise H.J., Nagels L.J. Chemiresistive sensors of electrically conducting poly (2,5-thienylene vinylene) and copolymers: their responses to nine organic vapours. Sens. Actuators B. 50:1998;164-172.
3. Szklarshi T., Zakrzewska B., Rekas M. Thin oxide films as gas sensors. Thin Solid Films. 174:1989;269-275.
4. Promsong L., Sriyudthsak M. Thin tin-oxide film alcohol-gas sensor. Sens. Actuators B. 24-25:1995;504-506.
5. Horrillo M.C., Getino J., Gutiêrrez J., Arês L., Robla J.I., Garcia C., Sayago I. Measurements of VOCs in soils through a tin oxide multisensor system. Sens. Actuators B. 43:1997;193-199.
6. Getino J., Horrillo M.C., Gutiêrrez J., Arês L., Robla J.I., Garcia C., Sayago I. Analysis of VOCs with a tin oxide sensor array. Sens. Actuators B. 43:1997;200-205.
7. Siciliano P. Preparation, characterisation and applications of thin films for gas sensors prepared by cheap chemical method. Sens. Actuators B. 70:2000;153-164.
8. Shurmer H.V., Gardner J.W. Odour discrimination with an electronic nose. Sens. Actuators B. 8:1992;1-11.
9. Shurmer H.V., Gardner J.W., Chan H.T. The application of discrimination techniques to alcohols and tobaccos using tin-oxide sensors. Sens. Actuators. 18:1989;361-371.
10. Anno Y., Maekawa T., Tamaki J., Asano Y., Hayashi K., Miura N., Yamazoe N. Zinc-oxide based semicondcutor sensors for detecting acetone and capronaldehyde in the vapour of consommèsoup. Sens. Actuators B. 24-25:1995;623-627.
11. Promsong L., Sriyudthsak M. Thin tin-oxide film alcohol gas sensor. Sens. Actuators B. 24-25:1995;504-506.
12. 2 gas sensors. Sens. Actuators B. 23:1995;75-81.
13. Patel N.G., Makhija K.K., Panchal C.J. Fabrication of carbon dioxide gas sensor and its alarm system using indium tin oxide thin films. Sens. Actuators B. 21:1994;193-197.
14. Patel N.G., Makhija K.K., Panchal C.J., Dave D.B., Vaishnav V.S. Fabrication of carbon tetrachloride gas sensors using indium tin oxide thin films. Sens. Actuators B. 23:1995;49-53.
15. 2 gas sensors. Sens. Actuators B. 15:1988;235-242.
16. 2 gas sensors. Thin Solid Films. 186:1990;349-360.
17. Galkidas A., Marthunas Z., Setkus A. Tin-indium oxide-based chlorine gas sensor. Sens. Actuators B. 7(1-3):1992;633-636.
18. Zhang J., Hu J.Q., Zhu F.R., Gong H., O'shea S.J. ITO thin films coated quartz crystal microbalance as gas sensor for NO detection. Sens. Actuators B. 87:2002;159-167.
19. Patel N.G., Lashkari B.H. Conducting transparent indium-tin oxide films by post-deposition annealing in different humidity environments. J. Mater. Sci. 27:1992;3026-3031.
20. P. Nelli, G. Sberveglieri, in: A. D'Amico, G. Sberveglieri (Eds.), Sensors for Domestic Applications, Proceedings of the First European School on Sensors (ESS'94), World Scientific, Singapore, 1995, pp. 37-47.
21. Patel S.M., Patel N.G. Stimulated crystallization of polycrystalline ZnTe films. Thin Solid Films. 22:1984;287-304.