Thickness dependence of structural, electrical and optical properties of indium tin oxide (ITO) films deposited on PET substrates

Applied Surface Science

Volumn 254, Issue 11, 2008, Pages 3504-3508

  Hao, Lei ^a   Diao, Xungang ^a   Xu, Huaizhe ^a   Gu, Baoxia ^a   Wang, Tianmin ^a  

^a BEIHANG UNIVERSITY   (China)

Author keywords

DC magnetron sputtering; Indium tin oxide (ITO); Multi arc ion plating; Optical transmittance; PET substrates; Sheet resistance

Indexed keywords

FILM THICKNESS; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; OPACITY; POLYETHYLENE TEREPHTHALATES; SHEET RESISTANCE;

INDIUM TIN OXIDE (ITO); MULTI ARC ION PLATING;

THIN FILMS;

EID: 39749185407     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.11.063     Document Type: Article

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