Preparation and characterization of indium tin oxide thin films for their application as gas sensors

Thin Solid Films

Volumn 487, Issue 1-2, 2005, Pages 277-282

  Vaishnav, V S ^a   Patel, P D ^a   Patel, N G ^b  

^a SARDAR PATEL UNIVERSITY   (India)

^b UNIVERSITY OF NORTH FLORIDA   (United States)

Author keywords

Gas sensor; Indium tin oxide (ITO); Oxide semiconductor

Indexed keywords

ANNEALING; CATALYSIS; CHEMICAL SENSORS; CHEMISORPTION; ELECTRIC PROPERTIES; EVAPORATION; MICROSTRUCTURE; REDOX REACTIONS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING INDIUM COMPOUNDS; THERMAL EFFECTS;

CATALYTIC LAYERS; INDIUM TIN OXIDE (ITO) FILMS; OXIDE SEMICONDUCTORS; STRUCTURAL PROPERTIES;

THIN FILMS;

EID: 22944481791     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.01.079     Document Type: Conference Paper

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