Imaging and strain analysis of nano-scale SiGe structures by tip-enhanced Raman spectroscopy

Ultramicroscopy

Volumn 111, Issue 11, 2011, Pages 1630-1635

  Hermann, Peter ^a,b,c   Hecker, Michael ^b   Chumakov, Dmytro ^b   Weisheit, Martin ^b   Rinderknecht, Jochen ^b   Shelaev, Artem ^d   Dorozhkin, Pavel ^d   Eng, Lukas M ^e  

^a Fraunhofer Center Nanoelectronic Technologies   (Germany)

^b GLOBALFOUNDRIES   (Germany)

^c ROBERT KOCH INSTITUTE   (Germany)

^d NT MDT Co   (Russian Federation)

^e DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Enhanced Raman scattering; Nano scale chemical microscopy; Silicon germanium (SiGe); Spectroscopic imaging; Stress and strain in silicon; Tip enhanced Raman spectroscopy (TERS)

Indexed keywords

ENHANCED RAMAN SCATTERING; NANO SCALE; SILICON GERMANIUM; SPECTROSCOPIC IMAGING; TIP-ENHANCED RAMAN SPECTROSCOPY;

CMOS INTEGRATED CIRCUITS; GERMANIUM; NANOTECHNOLOGY; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SILICON ALLOYS; STRESS CONCENTRATION;

SPECTRUM ANALYSIS;

GERMANIUM; SILICON;

ANISOTROPY; ARTICLE; CHEMICAL ANALYSIS; ELECTROMAGNETIC FIELD; IMAGE ANALYSIS; IMAGE PROCESSING; IMAGING; PIEZOELECTRICITY; POLARIZATION; RAMAN SPECTROMETRY; SCANNING ELECTRON MICROSCOPY; TIP ENHANCED RAMAN SPECTROSCOPY; TOPOGRAPHY;

SIGE;

EID: 80053374187     PISSN: 03043991     EISSN: 18792723     Source Type: Journal    
DOI: 10.1016/j.ultramic.2011.08.009     Document Type: Article

References (37)

1. Sun Y., Thompson S.E., Nishida T. Journal of Applied Physics 2007, 101:104503.
2. Lee M.L., Fitzgerald E.A., Bulsara M.T., Currie M.T., Lochtefeld A. Journal of Applied Physics 2005, 97:011101.
3. Kammler T., Pedeius I., Wei A., Romero K., Reichel C., Heinemann S., Engelmann H.-J. ESC Transactions 2006, 3(7):713-718.
4. Bauer M., Weeks D., Zhang Y., Machkaostan V. ESC Transactions 2006, 3(7):187-196.
5. Flachowsky S., Illgen R., Herrmann T., Klix W., Stenzel R., Ostermay I., Naumann A., Wei A., Hontschel J., Horstmann M. Journal of Vacuum Science and Technology B. 2010, 28:C1G12.
6. Fischetti M.V., Laux S.E. Journal of Applied Physics 1996, 80:2234.
7. Lee M.L., Fitzgerald E.A., Bulsara M.T., Currie M.T., Lochtefeld A. Journal of Applied Physics 2005, 97:011101.
8. Loudon R. Advances in Physics 1964, 13(52):423-482.
9. de Wolf I., Maes H.E., Jones S.K. Journal of Applied Physics 1996, 79:9.
10. Poborchii V., Tada T., Kanayama T. Applied Physics Letters 2007, 91:241902.
11. Tan P.H., Bougeard D., Abstreiter G., Brunner K. Journal of Applied Physics 2005, 98:113517.
12. Hermann P., Hecker M., Renn F., Rölke M., Kolanek K., Rinderknecht J., Eng L.M. Journal of Applied Physics 2011, 109:124513.
13. Kneipp K., Moskovits M., Kneipp H. Surface-Enhanced Raman Scattering: Physics and Applications. Topics in Applied Physics 2006, vol. 103. Springer Verlag, Berlin.
14. Stöckle R.M., Suh Y.D., Deckert V., Zenobi R. Chemical Physics Letters 2000, 318:131.
15. Pettinger B. Tip-enhanced Raman Spectroscopy (TERS). Topics in Applied Physics 2006, vol. 103. Springer Verlag, Berlin, pp. 217-240.
16. Sun W.X., Shen Z.X. Ultramicroscopy 2003, 94:237-244.
17. Zhu L., Georgi C., Hecker M., Rinderknecht J., Mai A., Ritz Y., Zschech E. Journal of Applied Physics 2007, 101:104305.
18. Hayazawa N., Motohashi M., Saito Y., Ishitobi H., Ono A., Ichimura T., Verma P., Kawata S. Journal of Raman Spectroscopy 2007, 38:684-696.
19. Lee N., Hartschuh R.D., Mehtani D., Kisliuk A., Maguire J.F., Green M., Foster M.D., Sokolov A.P. Journal of Raman Spectroscopy 2007, 38:789-796.
20. Motohashi M., Hayazawa N., Tarun A., Kawata S. Journal of Applied Physics 2008, 103:034309.
21. Anderson N., Bouhelier A., Novotny L. Journal of Optics A: Pure and Applied Optics 2006, 8:227-233.
22. Cancado L.G., Hartschuh A., Novotny L. Journal of Raman Spectroscopy 2009, 40:1420.
23. Steidtner J., Pettinger B. Physical Review Letters 2008, 100:236101.
24. Olk P., Renger J., Härtling T., Wenzel M.T., Eng L.M. Nano Letters 2007, 7(6):1736-1740.
25. Campbell P.M., Snow E.S., McMarr P.J. Applied Physics Letters 1995, 66(11).
26. Kolanek K., Hermann P., Dudek P.T., Gotszalk T., Chumakov D., Weisheit M., Hecker M., Zschech E. Thin Solid Films 2010, 12(518):3267-3272.
27. Hartschuh A. Angewandte Chemie International Edition 2008, 47:8178-8191.
28. Tarun A., Hayazawa N., Kawata S. Analytical and Bioanalytical Chemistry 2009, 394:1775-1785.
29. Bouhelier A. Microscopy Research and Technique 2006, 69:563-579.
30. Novotny L., Hecht B. Principles of Nano-Optics 2006, Cambridge University Press, New York.
31. Gucciardi P.G., Lopes M., Déturche R., Julien C., Barchiesi D., Lamy de la Chapelle M. Nanotechnology 2008, 19:215702.
32. Schorer R., Abstreiter G., de Gironcoli S., Molinari E., Kibbel H., Presting H. Physical Review B 1994, 49(8):5406-5414.
33. De Wolf I., Norström H., Maes H.E. Journal of Applied Physics 1993, 74:7.
34. Domke K.F., Pettinger B. Journal Raman Spectroscopy 2009, 40:1427-1433.
35. Pettinger B., Domke K.F., Zhang D., Piccardi G., Schuster R. Surface Science 2009, 603:1335-1341.
36. Hecker M., Zhu L., Georgi C., Zienert I., Rinderknecht J., et al. AIP Proceedings 2007, 931:435.
37. Jain S.C., Dietrich B., Richter H., Atkinson A., Harker A.H. Physical Review B 1995, 52:9.