Analytics and metrology of strained silicon structures by raman and nano-raman spectroscopy

AIP Conference Proceedings

Volumn 931, Issue , 2007, Pages 435-444

  Hecker, Michael ^a   Zhu, Liang ^a,b   Georgi, Carsten ^a,c   Zienert, Inka ^a   Rinderknecht, Jochen ^a   Geisler, Holm ^a   Zschech, Ehrenfried ^a  

^a IBM MICROELECTRONICS   (United States)

^b ETH ZURICH   (Switzerland)

^c UNIVERSITY OF MUNICH   (Germany)

Author keywords

Nano Raman; Raman spectroscopy; Silicon germanium; Strained silicon; TERS

Indexed keywords

EID: 35348880881     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2799413     Document Type: Conference Paper

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