3-D vision feedback for nanohandling monitoring in a scanning electron microscope

International Journal of Optomechatronics

Volumn 1, Issue 1, 2007, Pages 4-26

  Jähnisch, Marco ^a   Fatikow, Sergej ^b  

^a R D Division Microsystems Technology and Nanohandling   (Germany)

^b UNIVERSITY OF OLDENBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85009630373     PISSN: 15599612     EISSN: 15599620     Source Type: Journal    
DOI: 10.1080/15599610701232630     Document Type: Article

References (25)

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