Novel four-point-probe design and nanorobotic dual endeffector strategy for electrical characterization of as-grown SWCNT bundles

Proceedings - IEEE International Conference on Robotics and Automation

Volumn , Issue , 2010, Pages 4100-4105

  Eichhorn, V ^a   Fatikow, S ^a   Sardan Sukas, O ^b   Hansen, T M ^b   Boggild P ^b   Occhipinti, L G ^c  

^a UNIVERSITY OF OLDENBURG   (Germany)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^c STMICROELECTRONICS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AS-GROWN; ELECTRICAL CHARACTERIZATION; ELECTRICAL CONTACTS; ELECTRICAL MEASUREMENT; END-EFFECTOR SYSTEMS; FOUR POINT PROBE; FOUR-POINT; MICROSTRUCTURED; NEW DESIGN; NON DESTRUCTIVE; SILICON SUBSTRATES; TEST PATTERN; VERTICALLY ALIGNED;

CHEMICAL VAPOR DEPOSITION; NANOROBOTICS; PROBES; SINGLE-WALLED CARBON NANOTUBES (SWCN);

ROBOTICS;

EID: 77955798417     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ROBOT.2010.5509952     Document Type: Conference Paper

References (25)

1. N. Srivastava, H. Li, F. Kreupl, and K. Banerjee, "On the Applicability of Single-Walled Carbon Nanotubes as VLSI Interconnects," IEEE Transactions on Nanotechnology, vol. 8, no. 4, pp. 542-559, 2009.
2. C. Rutherglen and P. Burke, "Nanoelectromagnetics: Circuit and Electromagnetic Properties of Carbon Nanotubes," Small, vol. 5, no. 8, pp. 884-906, 2009.
3. P. Avouris, J. Appenzeller, R. Martel, and S. J. Wind, "Carbon nanotube electronics," Proceedings of the IEEE, vol. 91, no. 11, pp. 1772-1784, November 2003.
4. W. Hoenlein, F. Kreupl, G. S. Duesberg, A. P. Graham, M. Liebau, R. V. Seidel, and E. Unger, "Carbon Nanotube Applications in Microelectronics, " IEEE Transactions on Components and Packaging Technologies, vol. 27, no. 4, pp. 629-634, December 2004.
5. B. Mahar, C. Laslau, R. Yip, and Y. Sun, "Development of Carbon Nanotube-Based Sensors - A Review," IEEE Sensors Journal, vol. 7, no. 2, pp. 266-284, 2007.
6. N. Sinha, J. Ma, and J. T. W. Yeow, "Carbon Nanotube-Based Sensors," Journal of Nanoscience and Nanotechnology, vol. 6, p. 573590, 2006. [Online]. Available: http://biomems.uwaterloo.ca/papers/JNN.pdf
7. T. Guo, P. Nikolaev, A. Thess, D. T. Colbert, and R. E. Smalley, "Catalytic growth of single-walled nanotubes by laser vaporization," Chemical Physics Letters, vol. 243, pp. 49-54, 1995.
8. T. W. Ebbesen and P. M. Ajayan, "Large-scale synthesis of carbon nanotubes," Nature, vol. 358, pp. 220-222, 1992.
9. K. B. K. Teo, M. Chhowalla, G. A. J. Amaratunga, W. I. Milne, D. G. Hasko, G. Pirio, P. Legagneux, F. Wyczisk, and D. Pribat, "Uniform patterned growth of carbon nanotubes without surface carbon," Applied Physics Letters, vol. 79, no. 10, pp. 1534-1536, 2001.
10. T. Fukuda, F. Arai, and L. Dong, "Assembly of Nanodevices With Carbon Nanotubes Through Nanorobotic Manipulations," Proceedings of the IEEE, vol. 91, no. 11, pp. 1803-1818, 2003.
11. L. Dong and B. J. Nelson, "Robotics in the Small, Part II: Nanorobotics," IEEE Robotics & Automation Magazine, vol. 14, no. 3, pp. 111-121, 2007.
12. S. Fatikow and V. Eichhorn, "Nanohandling automation: trends and current developments," Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, vol. 222, no. 7, pp. 1353-1369, 2008.
13. V. Eichhorn, K. Carlson, K. N. Andersen, S. Fatikow, and P. Bggild, "Nanorobotic Manipulation Setup for Pick-and-Place Handling and Nondestructive Characterization of Carbon Nanotubes," in Proceedings of the 2007 IEEE/RSJ International Conference on Intelligent Robots and Systems, San Diego, CA, USA, 2007, p. TuA10.4.
14. K. Carlson, K. N. Andersen, V. Eichhorn, D. H. Petersen, K. Mølhave, I. Y. Y. Bu, K. B. K. Teo, W. I. Milne, S. Fatikow, and P. Bøggild, "A carbon nanofibre scanning probe assembled using electrothermal microgripper," Nanotechnology, vol. 18, no. 34, p. 345501, 2007.
15. O. Sardan, V. Eichhorn, D. H. Petersen, S. Fatikow, O. Sigmund, and P. Bøggild, "Rapid prototyping of nanotube-based devices using topology-optimized microgrippers," Nanotechnology, vol. 19, p. 495503, 2008.
16. F. M. Smits, "Measurement of sheet resistivities with the four point probe," The Bell System Technical Journal, vol. 37, pp. 711-718, 1958.
17. C. L. Petersen, T. M. Hansen, P. Boggild, A. Boisen, O. Hansen, T. Hassenkam, and F. Grey, "Scanning microscopic four-point conductivity probes," Sensors and Actuators A, vol. 96, pp. 53-58, 2002.
18. S. Dohn, K. Molhave, and P. Boggild, "Direct Measurement of Resistance of Multiwalled Carbon Nanotubes Using Micro Four-Point Probes," Sensor Letters, vol. 3, no. 4, pp. 300-303, 2005.
19. R. Angelucci, R. Rizzoli, V. Vinciguerra, M. Fortuna Bevilacqua, S. Guerri, F. Corticelli, and M. Passini, "Growth of carbon nanotubes by Fe-catalyzed chemical vapor processes on silicon-based substrates," Physica E, vol. 37, no. 1-2, pp. 11-15, 2006.
20. C. L. Petersen, F. Grey, I. Shiraki, and S. Hasegawa, "Microfour-point probe for studying electronic transport through surface states," Applied Physics Letters, vol. 77, no. 23, pp. 3782-3784, 2000.
21. S. Datta, Electronic Transport in Mesoscopic Systems. Cambridge University Press, 1995.
22. M. S. Purewal, B. Hee Hong, A. Ravi, B. Chandra, J. Hone, and P. Kim, "Scaling of Resistance and Electron Mean Free Path of Single-Walled Carbon Nanotubes," Physical Review Letters, vol. 98, no. 18, p. 186808, 2007.
23. D. Jasper, C. Edeler, C. Diederichs, M. Naroska, C. Stolle, and S. Fatikow, "Towards automated robotic nanomanipulatin systems," in Proceedings of IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), 2009.
24. T. Wortmann, C. Dahmen, R. Tunnell, and S. Fatikow, "Image processing architecture for real-time micro- and nanohandling applications," in Proceedings of IAPR Conference on Machine Vision Applications (MVA), 2009.
25. V. Eichhorn, S. Fatikow, T. Wich, C. Dahmen, T. Sievers, K. N. Andersen, K. Carlson, and P. Bøggild, "Depth-detection methods for microgripper based CNT manipulation in a scanning electron microscope," Journal of Micro-Nano Mechatronics, vol. 4, pp. 27-36, 2008.