A large-stroke electrostatic micro-actuator

Journal of Micromechanics and Microengineering

Volumn 21, Issue 7, 2011, Pages

  Towfighian, S ^a   Seleim, A ^b   Abdel Rahman, E M ^c   Heppler, G R ^c  

^a UNIVERSITY OF TORONTO   (Canada)

^b UNIVERSITY OF WINDSOR   (Canada)

^c UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM APPROACH; HIGH-ORDER; INPUT VOLTAGES; LARGE-STROKE; LOW FREQUENCY; MICROCANTILEVER BEAMS; OPERATION RANGE; PARALLEL-PLATE ELECTROSTATIC ACTUATORS; RESTORING FORCES; SUPERHARMONIC RESONANCE;

ELECTRIC POTENTIAL; ELECTROSTATIC DEVICES; ELECTROSTATIC FORCE; MEMS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; VOLTAGE CONTROL; VOLTAGE REGULATORS;

ELECTROSTATIC ACTUATORS;

EID: 79960062871     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/7/075023     Document Type: Article

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