Real time controller design to solve the "pull-in" instability of MEMS actuator

2008 10th International Conference on Control, Automation, Robotics and Vision, ICARCV 2008

Volumn , Issue , 2008, Pages 1724-1729

  Nikpanah, M H ^a   Wang, Y ^a   Lewis, F L ^b   Liu, A Q ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b UNIVERSITY OF TEXAS AT ARLINGTON   (United States)

Author keywords

"pull in" instability; Closed loop feedback control; Equilibrium point; Full gap range; Microactuator

Indexed keywords

'PULL-IN' INSTABILITY; CLOSED-LOOP FEEDBACK CONTROL; EQUILIBRIUM POINT; FULL GAP RANGE; MICROACTUATOR;

ACTUATORS; ELECTRIC POTENTIAL; ELECTROSTATIC ACTUATORS; FEEDBACK; FEEDBACK CONTROL; FLOW CONTROL; MEMS; MICROELECTROMECHANICAL DEVICES; NEURAL NETWORKS; ROBOTICS; VOLTAGE REGULATORS;

COMPUTER VISION;

EID: 64549115827     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICARCV.2008.4795787     Document Type: Conference Paper

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