Solving the "pull-in" instability problem of electrostatic microactuators using nonlinear control techniques

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Volumn , Issue , 2007, Pages 1190-1195

  Owusu, Kwadwo O ^a,b   Lewis, Frank L ^a,b  

^a IEEE

^b UNIVERSITY OF TEXAS AT ARLINGTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FEEDBACK CONTROL; MEMS; NONLINEAR CONTROL SYSTEMS; ROBUSTNESS (CONTROL SYSTEMS); STABILITY; VOLTAGE CONTROL;

CAPACITIVE GAP; ELECTROSTATIC ACTUATION; PARAMETER VARIATION ROBUSTNESS;

ELECTROSTATIC ACTUATORS;

EID: 34548126815     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2007.352232     Document Type: Conference Paper

References (11)

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