Design and fabrication of 10×10 micro-spatial light modulator array for phase and amplitude modulation

Sensors and Actuators, A: Physical

Volumn 78, Issue 1, 1999, Pages 63-70

  Chung, Seok Whan ^a   Kim, Yong Kweon ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ADAPTIVE OPTICS; AMPLITUDE MODULATION; DIFFRACTION; ELECTRODES; LIGHT MODULATORS; LIGHT REFLECTION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL DESIGN; PHASE MODULATION; PHOTORESISTS;

DOUBLE CRAB LEG SPRING; MICRO-SPATIAL LIGHT MODULATORS (MICRO-SLM) ARRAYS; MICROOPTOELECTROMECHANICAL SYSTEMS (MOEMS);

LIGHT MODULATION;

EID: 0343462147     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00205-8     Document Type: Article

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