Control of a MEMS optical switch

Proceedings of the IEEE Conference on Decision and Control

Volumn 3, Issue , 2004, Pages 3039-3044

  Borovic, B ^b   Hong, C ^a   Liu, A Q ^a   Xie, L ^a   Lewis, F L ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b UNIVERSITY OF TEXAS AT ARLINGTON   (United States)

Author keywords

Control; Electrostatic actuator; MEMS; Modeling; Optical switch

Indexed keywords

BANDWIDTH; COMPUTER SIMULATION; CONTROL; DIFFERENTIAL EQUATIONS; DYNAMICS; ELECTROSTATIC ACTUATORS; FEEDBACK; IDENTIFICATION (CONTROL SYSTEMS); MATHEMATICAL MODELS; OPTICAL SWITCHES;

ALL-OPTICAL NETWORKS (AON); MEMS; MODELING;

MICROELECTROMECHANICAL DEVICES;

EID: 14244251063     PISSN: 07431546     EISSN: 25762370     Source Type: Conference Proceeding    
DOI: 10.1109/cdc.2004.1428930     Document Type: Conference Paper

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