Nonlinear control of an electrostatic micromirror beyond pull-in with experimental validation

Journal of Microelectromechanical Systems

Volumn 18, Issue 4, 2009, Pages 914-923

  Agudelo, Carlos G ^a,b   Packirisamy, Muthukumaran ^b   Zhu, Guchuan ^a   Saydy, Lahcen ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^b Gina Cody School of Engineering and Computer Science   (Canada)

Author keywords

Control systems; Electrostatic micromirrors; Microelectromechanical systems (MEMS); Modeling; Nonlinear control

Indexed keywords

COMMERCIAL OFF THE SHELVES; CONTROLLER TUNING; DEVICE CHARACTERIZATION; DRIVING CIRCUITS; EXPERIMENTAL VALIDATIONS; LABORATORY ENVIRONMENT; MICRO ELECTRO MECHANICAL SYSTEM; MICRO MIRROR; MICROELECTROMECHANICAL SYSTEMS (MEMS); MODELING; NON-LINEAR TRACKING CONTROL; NONLINEAR CONTROL; NONLINEAR CONTROL TECHNIQUE; POTENTIAL BENEFITS; PRACTICAL SOLUTIONS; PULL-IN; SENSING SCHEMES; SET-POINT; STABLE OPERATION; SYSTEM OPERATION; SYSTEM'S PERFORMANCE; TRAJECTORY PLANNING;

COMPOSITE MICROMECHANICS; CONTROL SYSTEM ANALYSIS; CONTROL SYSTEMS; ELECTROSTATICS; FEEDBACK; FEEDBACK LINEARIZATION; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; NONLINEAR CONTROL SYSTEMS;

CONTROLLERS;

EID: 68849128828     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2021819     Document Type: Article

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