Experimental validation for an extended-stability electrostatic actuator

Proceedings of the ASME Design Engineering Technical Conference

Volumn 4, Issue , 2010, Pages 631-638

  Towfighian, S ^a   Seleim, A ^a   Abdel Rahman, E M ^a   Heppler, G R ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATOR SYSTEM; BEAM DEFLECTION; CLOSED LOOP MODELS; CLOSED LOOPS; EXPERIMENTAL VALIDATIONS; HARMONIC VOLTAGES; IDENTIFIED PARAMETER; INPUT VOLTAGES; MICROCANTILEVER BEAMS; OPERATION RANGE; PULL-IN; STATIC RESPONSE; VOLTAGE DIFFERENCE;

CLOSED LOOP SYSTEMS; COMPUTER SIMULATION; DESIGN; DYNAMIC RESPONSE; ELECTRIC POTENTIAL; ELECTROSTATIC FORCE; MICROACTUATORS; NANOSYSTEMS; VOLTAGE REGULATORS;

ELECTROSTATIC ACTUATORS;

EID: 80055009628     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/DETC2010-28983     Document Type: Conference Paper

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