Computationally efficient modelling of pattern dependencies in the micro-embossing of thermoplastic polymers

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 1453-1456

  Taylor, Hayden ^a   Boning, Duane ^a   Iliescu, Ciprian ^b   Chen, Bangtao ^b  

^a Massachusetts Institute of Technology   (United States)

^b INSTITUTE OF BIOENGINEERING AND NANOTECHNOLOGY   (Singapore)

Author keywords

Computer aided design; Hot micro embossing; Pattern dependencies; PMMA; Simulation

Indexed keywords

COMPUTATIONAL EFFICIENCY; COMPUTER AIDED DESIGN; MATHEMATICAL MODELS; POLYMETHYL METHACRYLATES; PRESSURE EFFECTS;

ELASTIC MODELS; HOT MICRO-EMBOSSING; PATTERN DEPENDENCIES;

THERMOPLASTIC ELASTOMERS;

EID: 44249101417     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.01.015     Document Type: Article

References (11)

1. M. Dirckx, H. Taylor, D. Hardt, in: Proceedings of the Society of Plastics Engineers Annual Technical Conference, Cincinnati, OH, 2007, pp. 2972-2976.
2. N.M. Ames, Ph.D. dissertation, Massachusetts Institute of Technology, 2007.
3. Scheer H.-C., Bogdanski N., Wissen M., Konishi T., and Hirai Y. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 23 (2005) 2963-2966
4. Scheer H.-C., Bogdanski N., Möllenbeck S., Wissen M., Zimmer K., and Zajadacz J. Microelectronic Engineering 84 (2007) 949-952
5. Hirai Y., Konishi T., Yoshikawa T., and Yoshida S. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 22 (2004) 3288-3293
6. Sirotkin V., Svintsov A., Schift H., and Zaitsev S. Microelectronic Engineering 84 (2007) 868-871
7. X. Xie, Ph.D. dissertation, Massachusetts Institute of Technology, 2007.
8. Ouma D.O., Boning D.S., Chung J.E., Easter W.G., Saxena V., Misra S., and Crevasse A. IEEE Transactions on Semiconductor Manufacturing 15 (2002) 232-244
9. Taylor H.K., Sun H., Hill T.F., Farahanchi A., and Boning D.S. Journal of the Electrochemical Society 153 (2006) C575-C585
10. Rowland H.D., and King W.P. Journal of Micromechanics and Microengineering 14 (2004) 1625-1632
11. Rowland H.D., King W.P., Sun A.C., and Schunk P.R. Journal of Micromechanics and Microengineering 15 (2005) 2414-2425