메뉴 건너뛰기




Volumn 20, Issue 6, 2010, Pages

An investigation of the detrimental impact of trapped air in thermoplastic micro-embossing

Author keywords

[No Author keywords available]

Indexed keywords

CAVITY FILLING; EFFECTIVE STIFFNESS; FAST SIMULATION; GLASS TRANSITION TEMPERATURE; LINEAR VISCOELASTIC; PATTERN REPLICATION; SIMULATION RESULT; STAMP DESIGN; THERMOPLASTIC POLYMER;

EID: 78650901367     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/6/065014     Document Type: Article
Times cited : (19)

References (26)
  • 1
    • 18844403821 scopus 로고    scopus 로고
    • The zeta potential of cyclo-olefin polymer microchannels and its effects on insulative (electrodeless) dielectrophoresis particle trapping devices
    • Mela P, Van Den Berg A, Fintschenko Y, Cummings E B, Simmons B A and Kirby B J 2005 The zeta potential of cyclo-olefin polymer microchannels and its effects on insulative (electrodeless) dielectrophoresis particle trapping devices Electrophoresis 26 1792-9
    • (2005) Electrophoresis , vol.26 , pp. 1792-1799
    • Mela, P.1    Van Den Berg, A.2    Fintschenko, Y.3    Cummings, E.B.4    Simmons, B.A.5    Kirby, B.J.6
  • 2
    • 0034656239 scopus 로고    scopus 로고
    • Room-temperature imprinting method for plastic microchannel fabrication
    • Xu J, Locascio L, Gaitan M and Lee C S 2000 Room-temperature imprinting method for plastic microchannel fabrication Anal. Chem. 72 1930-3
    • (2000) Anal. Chem. , vol.72 , pp. 1930-1933
    • Xu, J.1    Locascio, L.2    Gaitan, M.3    Lee, C.S.4
  • 3
    • 32444435013 scopus 로고    scopus 로고
    • Thermoplastic microfluidic device for on-chip purification of nucleic acids for disposable diagnostics
    • Bhattacharyya A and Klapperich C M 2006 Thermoplastic microfluidic device for on-chip purification of nucleic acids for disposable diagnostics Anal. Chem. 78 788-92
    • (2006) Anal. Chem. , vol.78 , pp. 788-792
    • Bhattacharyya, A.1    Klapperich, C.M.2
  • 4
    • 0035984039 scopus 로고    scopus 로고
    • Poly(dimethylsiloxane) as a material for fabricating microfluidic devices
    • McDonald J C and Whitesides G M 2002 Poly(dimethylsiloxane) as a material for fabricating microfluidic devices Acc. Chem. Res. 35 491-9
    • (2002) Acc. Chem. Res. , vol.35 , pp. 491-499
    • McDonald, J.C.1    Whitesides, G.M.2
  • 6
    • 33749068241 scopus 로고    scopus 로고
    • Avery Dennison micro-nano replication capabilities for MEMS and microfluidics
    • Chu P 2005 Avery Dennison micro-nano replication capabilities for MEMS and microfluidics Proc. Int. Conf. on MEMS, Nano and Smart Systems p 27
    • (2005) Proc. Int. Conf. on MEMS, Nano and Smart Systems , pp. 27
    • Chu, P.1
  • 7
    • 78650879593 scopus 로고    scopus 로고
    • accessed 7 December 2009
    • Lab on Foil Integrated Project 2009 (accessed 7 December 2009) http://labonfoil.eu/
    • (2009) Lab on Foil Integrated Project
  • 8
    • 78650861596 scopus 로고    scopus 로고
    • accessed 7 December 2009
    • Jenoptik A G 2009 Hot embossing systems (accessed 7 December 2009) http://www.jo-mt.de/cps/rde/xchg/SID-26EE34DB-14E481B9/mikrotechnik-1/hs.xsl/ 3895.htm
    • (2009) Hot Embossing Systems
    • Jenoptik, A.G.1
  • 11
    • 31144438014 scopus 로고    scopus 로고
    • Dynamics of low capillary number interfaces moving through sharp features
    • Reddy S, Schunk P R and Bonnecaze R T 2005 Dynamics of low capillary number interfaces moving through sharp features Phys. Fluids 17 122104-6
    • (2005) Phys. Fluids , vol.17 , pp. 122104-122106
    • Reddy, S.1    Schunk, P.R.2    Bonnecaze, R.T.3
  • 12
    • 24644474741 scopus 로고    scopus 로고
    • Simulation of fluid flow in the step and flash imprint lithography process
    • DOI 10.1016/j.mee.2005.06.002, PII S0167931705003060
    • Reddy S and Bonnecaze R T 2005 Simulation of fluid flow in the step and flash imprint lithography process Microelectron. Eng. 82 60-70 (Pubitemid 41277004)
    • (2005) Microelectronic Engineering , vol.82 , Issue.1 , pp. 60-70
    • Reddy, S.1    Bonnecaze, R.T.2
  • 14
    • 33846849481 scopus 로고    scopus 로고
    • Air bubble formation and dissolution in dispensing nanoimprint lithography
    • Liang X, Tan H, Fu Z and Chou S Y 2007 Air bubble formation and dissolution in dispensing nanoimprint lithography Nanotechnology 18 025303
    • (2007) Nanotechnology , vol.18 , pp. 025303
    • Liang, X.1    Tan, H.2    Fu, Z.3    Chou, S.Y.4
  • 15
    • 0141613076 scopus 로고    scopus 로고
    • Impact of vacuum environment on the hot embossing process
    • Roos N, Wissen M, Glinsner T and Scheer H 2003 Impact of vacuum environment on the hot embossing process Proc. SPIE 5037 211-8
    • (2003) Proc. SPIE , vol.5037 , pp. 211-218
    • Roos, N.1    Wissen, M.2    Glinsner, T.3    Scheer, H.4
  • 16
    • 34247578136 scopus 로고    scopus 로고
    • Investigation of capillary bridges growth in NIL process
    • DOI 10.1016/j.mee.2007.01.134, PII S0167931707000688, Proceedings of the 32nd International Conference on Micro- and Nano-Engineering
    • Landis S, Chaix N, Hermelin D, Leveder T and Gourgon C 2007 Investigation of capillary bridges growth in NIL process Microelectron. Eng. 84 940-4 (Pubitemid 46678318)
    • (2007) Microelectronic Engineering , vol.84 , Issue.5-8 , pp. 940-944
    • Landis, S.1    Chaix, N.2    Hermelin, D.3    Leveder, T.4    Gourgon, C.5
  • 17
    • 33748889191 scopus 로고    scopus 로고
    • Influence of the molecular weight and imprint conditions on the formation of capillary bridges in nanoimprint lithography
    • Chaix N, Gourgon C, Landis S, Perret C, Fink M, Reuther F and Mecerreyes D 2006 Influence of the molecular weight and imprint conditions on the formation of capillary bridges in nanoimprint lithography Nanotechnology 17 4082-7
    • (2006) Nanotechnology , vol.17 , pp. 4082-4087
    • Chaix, N.1    Gourgon, C.2    Landis, S.3    Perret, C.4    Fink, M.5    Reuther, F.6    Mecerreyes, D.7
  • 20
    • 67849092525 scopus 로고    scopus 로고
    • A computationally simple method for simulating the micro-embossing of thermoplastic layers
    • Taylor H, Lam Y C and Boning D 2009 A computationally simple method for simulating the micro-embossing of thermoplastic layers J. Micromech. Microeng. 19 075007
    • (2009) J. Micromech. Microeng. , vol.19 , pp. 075007
    • Taylor, H.1    Lam, Y.C.2    Boning, D.3
  • 23
    • 37549007889 scopus 로고    scopus 로고
    • Prediction of molecular orientation in film stretching processes
    • Sato T, Itadani M, Arakawa K and Yamada T 2007 Prediction of molecular orientation in film stretching processes Japan. J. Appl. Phys. 46 7782-8
    • (2007) Japan. J. Appl. Phys. , vol.46 , pp. 7782-7788
    • Sato, T.1    Itadani, M.2    Arakawa, K.3    Yamada, T.4
  • 24
    • 77952331155 scopus 로고    scopus 로고
    • A method for the accelerated simulation of micro-embossed topographies in thermoplastic polymers
    • Taylor H, Hale M, Lam Y C and Boning D 2010 A method for the accelerated simulation of micro-embossed topographies in thermoplastic polymers J. Micromech. Microeng. 20 065001
    • (2010) J. Micromech. Microeng. , vol.20 , pp. 065001
    • Taylor, H.1    Hale, M.2    Lam, Y.C.3    Boning, D.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.