Anti-sticking behavior of DLC-coated silicon micro-molds

Journal of Micromechanics and Microengineering

Volumn 19, Issue 10, 2009, Pages

  Saha, B ^a   Liu, E ^b   Tor, S B ^a,b   Khun, N W ^b   Hardt, D E ^c   Chun, J H ^c  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVE STRENGTH; BONDING STRUCTURE; CRITICAL LOAD; DC MAGNETRON SPUTTERING; DLC COATINGS; DOPED DIAMOND-LIKE CARBON; FRICTION COEFFICIENTS; MECHANICAL AND TRIBOLOGICAL PROPERTIES; MICRO RAMAN SPECTROSCOPY; MICRO-FLUIDIC DEVICES; MICRO-MOLDS; MICROSCRATCHES; N-DOPED; PEAK POSITION; RAMAN PEAK; SECONDARY METALS; SI SUBSTRATES; SLIDING WEAR TESTS; SURFACE ENERGIES; TI DOPING; TI-DOPED DLC; TRIBOLOGICAL PERFORMANCE;

AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; CONTACT ANGLE; CRYSTAL ATOMIC STRUCTURE; DOPING (ADDITIVES); FLOW RATE; FRICTION; INTERFACIAL ENERGY; MECHANICAL PROPERTIES; METAL MOLDING; MOLDS; RAMAN SPECTROSCOPY; SILICON; SURFACE CHEMISTRY; SURFACE ROUGHNESS; SURFACE STRUCTURE; SURFACE TENSION; TITANIUM; TITANIUM POWDER METALLURGY; TRIBOLOGY;

COATINGS;

EID: 70350623092     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/10/105025     Document Type: Article

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