Modeling and optimization of the hot embossing process for micro- And nanocomponent fabrication

Journal of Microlithography, Microfabrication and Microsystems

Volumn 5, Issue 1, 2006, Pages

  Worgull, M ^a   Heckele, M ^a   Hetu J F ^b   Kabanemi, K K ^b  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

Hot embossing; Injection molding; Nanocomponents; Plastic molding

Indexed keywords

COMPUTER SIMULATION; INJECTION MOLDING; MICROSTRUCTURE; NANOTECHNOLOGY; OPTIMIZATION; PLASTIC MOLDS; PROJECT MANAGEMENT;

EMBOSSING; EMBOSSING SURFACE; NANOCOMPONENTS; NANORANGE;

NANOSTRUCTURED MATERIALS;

EID: 33748539687     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.2176729     Document Type: Article

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