Generation of Au micropatterns on two sidewalls of a Si channel through a PDMS shadow mask

Journal of Micromechanics and Microengineering

Volumn 21, Issue 6, 2011, Pages

  Wang, Hui ^a   Luo, Cheng ^a  

^a University of Texas at Arlington   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

3D GEOMETRIC MODEL; GEOMETRIC MODELS; MAXIMUM ERROR; MICROPATTERNS; PDMS MEMBRANE; POLYDIMETHYLSILOXANE PDMS; SHADOW MASK; SIDEWALL PATTERNS; TOP SURFACE;

GEOMETRY; MICROCHANNELS; MICROSTRUCTURE; SILICON; SILICONES; THERMAL EVAPORATION; THREE DIMENSIONAL;

GOLD COATINGS;

EID: 79957935942     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/6/067005     Document Type: Article

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