Fabrication of a stainless steel shadow mask using batch mode micro-EDM

Microsystem Technologies

Volumn 14, Issue 3, 2008, Pages 411-417

  Yi, Sang Min ^a   Park, Min Soo ^b   Lee, Young Soo ^a   Chu, Chong Nam ^b  

^a SAMSUNG Electronics   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; FABRICATION; PRODUCTIVITY;

ELECTRO DISCHARGE MACHINING; PENTACENE ACTIVE LAYERS; SHADOW MASK; SQUARE HOLE ARRAY MASKS;

STAINLESS STEEL;

EID: 38349110906     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0468-0     Document Type: Article

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