Fabrication of Au micropatterns on vertical Si sidewalls using flexible PDMS shadow masks

Journal of Micromechanics and Microengineering

Volumn 20, Issue 12, 2010, Pages

  Wang, Hui ^a   Chakraborty, Anirban ^a   Luo, Cheng ^a  

^a University of Texas at Arlington   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AU FILM; CONCAVE STRUCTURES; HOLLOW STRUCTURE; MICROPATTERNS; PDMS MEMBRANE; POLYDIMETHYLSILOXANE PDMS; SHADOW MASK; SIMPLE APPROACH; TECHNICAL NOTES; TOP SURFACE;

GOLD; MICROCHANNELS; SILICON;

SILICONES;

EID: 78649752715     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/12/127001     Document Type: Article

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