Fabrication of Au sidewall micropatterns using Si-reinforced PDMS molds

Sensors and Actuators, A: Physical

Volumn 152, Issue 1, 2009, Pages 96-103

  Liu, Xinchuan ^a   Luo, Cheng ^a  

^a University of Texas at Arlington   (United States)

Author keywords

Hot embossing; Si reinforced PDMS molds; Sidewall micropatterns

Indexed keywords

HOT EMBOSSING; POLYDIMETHYLSILOXANE PDMS; SI-REINFORCED PDMS MOLDS; SIDEWALL MICROPATTERNS; TOP SURFACES;

MICROCHANNELS; MOLDS; SILICON;

SILICONES;

EID: 67349116034     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.03.016     Document Type: Article

References (27)

1. Sze S.M. VLSI Technology. 2nd ed. (1988), McGraw-Hill Book Company, New York
2. Madou M. Fundamentals of Microfabrication (1995), CRC Press
3. Kovacs G.T.A. Micromachined Transducers Sourcebook (1998), McGraw-Hill
4. Bustillo J.M., Howe R.T., and Muller R.S. Surface micromachining for microelctromechanical systems. Proceedings of the IEEE, vol. 86 (1998) 1552-1574
5. Smith P.A., Nordquist C.D., Jackson T.N., Mayer T.S., Martin B.R., Mbindyo J., and Mallouk T.E. Electric-field assisted assembly and alignment of metallic nanowires. Appl. Phys. Lett. 77 (2000) 1399-1401
6. Fan D.L., Zhu F.Q., Cammarata R.C., and Chien C.L. Manipulation of nanowires in suspension by ac electric fields. Appl. Phys. Lett. 85 (2004) 4175-4177
7. Chung J.Y., Lee K.H., Lee J.H., and Ruoff R.S. Toward large-scale integration of carbon nanotubes. Langmuir 20 (2004) 3011-3017
8. Chen Z., Hu W.C., Guo J., and Saito K. Fabrication of nanoelectrodes based on controlled placement of carbon nanotubes using alternating-current electric field. J. Vac. Sci. Technol. B 22 (2004) 776-780
9. Englander O., Christensen D., Kim J., Lin L., and Morris S. Electric-field assisted growth and self-assembly of intrinsic silicon nanowires. Nano Letters 5 (2005) 705-708
10. Messer B., Song J.H., and Yang P. Microchannel networks for nanowire patterning. J. Am. Chem. Soc. 122 (2000) 10232-10233
11. Huang Y., Duan X., Wei Q., and Lieber C.M. Directed assembly of one-dimensional nanostructures into functional networks. Science 291 (2001) 630-633
12. Piner R.D., Zhu J., Xu F., Hong S., and Mirkin C. Dip-Pen nanolithography. Science 283 (1999) 661-663
13. Wang X., Ryu K.S., Bullen D.A., Zou J., Zhang H., Mirkin C.A., and Liu C. Scanning probe contact printing. Langmuir 19 (2003) 8951-8955
14. Xia Y.N., and Whitesides G.M. Soft lithography. Annu. Rev. Mater. Sci. 28 (1998) 153-184
15. Xia Y.N., Rogers J.A., Paul K., and Whitesides G.M. Unconventional methods for fabricating and patterning nanostructures. Chem. Rev. 99 (1999) 1823-1848
16. Chou S.Y., Krauss P.R., and Renstrom P.J. Imprint lithography with 25-nanometer resolution. Science 272 (1996) 85-87
17. Chou S.Y., Krauss P.R., and Renstrom P.J. Nanoimprint lithography. J. Vac. Sci. Technol. B 14 (1996) 4129-4133
18. Heckele M., and Schomburg W.K. Review on micro molding of thermoplastic polymers. J. Micromech. Microeng. 14 (2004) R1-R14
19. Luo C., Poddar R., and Liu X. An innovative intermediate-layer lithography approach to replicate micropatterns in a conducting polymer. J. Vac. Sci. Technol. B 24 2 (2006) L19-L22
20. Liu X., and Luo C. An intermediate-layer method for producing metal micropatterns. J. Vac. Sci. Technol. B 25 (2007) 677-685
21. Chakraborty A., Liu X., and Luo C. An intermediate-layer lithography method for generating multiple microstructures made of different conducting polymers. Microsyst. Technol. 13 (2007) 1175-1184
22. Liu X., Chakraborty A., and Luo C. Generation of all-polymeric diodes and capacitors using an innovative intermediate-layer lithography. In: Martingale J.P. (Ed). Progress in Solid State Electronics Research (2007), Nova Science Publishers, Inc. 127-139
23. Kimerling T.E., Liu W., Kim B.H., and Yao D. Rapid hot embossing of polymer microfeatures. Microsyst. Technol. 12 (2006) 730-735
24. Chaudhury M.K., Weaver T., Hui C.Y., and Kramer E.J. Adhesive contact of cylindrical lens and a flat sheet. J. Appl. Phys. 80 (1996) 30-37
25. Hara S., Izumi S., Kumagai T., and Sakai S. Surface energy, stress and structure of well-relaxed amorphous silicon: a combination approach of ab initio and classical molecular dynamics. Surf. Sci. 585 1-2 (2005) 17-24
26. Luo C., Meng F., Liu X., and Guo Y. Reinforcement of a PDMS master using an oxide-coated silicon plate. Microelectron. J. 37 (2006) 5-11
27. Lee S.J., Han S.W., Hyun S.M., Lee H.J., Kim J.H., and Kim Y.I. Measurement of Young's modulus and Poisson's ratio for thin Au films using a visual image tracing system. Curr. Appl. Phys. 9 (2009) S75-S78