3D microfabrication with inclined/rotated UV lithography

Sensors and Actuators, A: Physical

Volumn 111, Issue 1, 2004, Pages 14-20

  Han, Manhee ^a   Lee, Woonseob ^a   Lee, Sung Keun ^a   Lee, Seung S ^a,b  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

3D microfabrication; Inclined UV lithography; Reflected UV; Rotated UV lithography; SU 8

Indexed keywords

CROSSLINKING; LIQUID CRYSTAL DISPLAYS; MICROMACHINING; MICROSTRUCTURE; ORGANIC SOLVENTS; REACTIVE ION ETCHING; REFLECTION; REFRACTIVE INDEX; ULTRAVIOLET RADIATION;

3D MICROFABRICATION TECHNOLOGY; INCLINED UV LITHOGRAPHY; REFLECTED UV; ROTATED UV LITHOGRAPHY; SU-8;

LITHOGRAPHY;

EID: 0442280362     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.10.006     Document Type: Conference Paper

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