A three-dimensional microfabrication technology on highly structured surfaces

Electrochemical and Solid-State Letters

Volumn 10, Issue 1, 2007, Pages

  Su, Wang Shen ^a   Tsai, Ming Shih ^b   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTROLESS PLATING; MICROSTRUCTURE; PLASMA APPLICATIONS; SELF ASSEMBLY; SUBSTRATES; THREE DIMENSIONAL;

FILM DEPOSITION; MICROBEAMS; PLASMA TREATMENT; SUSPENDED MICROSTRUCTURES;

LITHOGRAPHY;

EID: 33845353722     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2363949     Document Type: Article

References (12)

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