A generalized CMOS-MEMS platform for micromechanical resonators monolithically integrated with circuits

Journal of Micromechanics and Microengineering

Volumn 21, Issue 6, 2011, Pages

  Chen, Wen Chien ^a   Fang, Weileun ^a   Li, Sheng Shian ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFIER CIRCUITS; CMOS-MEMS; DESIGN FLEXIBILITY; EFFECTIVE TEMPERATURE; FLEXIBLE DESIGNS; IC FABRICATION; MECHANICAL BOUNDARIES; METAL-OXIDE; MICROMECHANICAL RESONATOR; MONOLITHICALLY INTEGRATED; MULTI-USER; PERFORMANCE ENHANCEMENTS; RF APPLICATIONS; STRUCTURAL MATERIALS; TIMING REFERENCES; VARIOUS CONFIGURATION;

INTEGRATION; MICROELECTROMECHANICAL DEVICES; RESONATORS; STRUCTURE (COMPOSITION); TURNAROUND TIME;

CMOS INTEGRATED CIRCUITS;

EID: 79957928835     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/6/065012     Document Type: Article

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