Fully CMOS integrated low voltage 100 MHz MEMS resonator

Electronics Letters

Volumn 41, Issue 24, 2005, Pages 1327-1328

  Uranga, A ^a   Teva, J ^a   Verd, J ^a   Lopez J L ^a   Torres, F ^a   Esteve, J ^b   Abadal, G ^a   Perez Murano F ^b   Barniol, N ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFIERS (ELECTRONIC); CAPACITANCE; CMOS INTEGRATED CIRCUITS; INTEGRATION; MICROPROCESSOR CHIPS; NATURAL FREQUENCIES; READOUT SYSTEMS; RESONATORS;

MICRO-RESONATORS; PADDLE POLYSILICON; READ-OUT AMPLIFIERS; RESONANT DEVICE;

MICROELECTROMECHANICAL DEVICES;

EID: 28444464817     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20053473     Document Type: Article

References (6)

1. Leach, R., Cui, Z., and Flack, D.: ' Microsystems technology standardization roadmap ', Project IST-2001-37682 funded by the EU IST program, 2001)
2. Nguyen, C.T.: ' Vibrating RF MEMS for low power wireless communications ', Proc. Int. MEMS Workshop (iMEMS'01), July 2001
3. Verd, J.: et al. ' Design, fabrication and characterization of a sub-microelectromechanical resonator with monolithically integrated CMOS readout circuit ', IEEE J. Microelectromech. Syst., 14, (3), p. 508-519
4. Uranga, A.: et al. ' A read-out strategy and circuit design for high frequency MEMS resonators ', Proc. IEEE Int. Symp. on Circuits and Systems, Kobe, Japan 2005
5. Kaajakari, V.: et al. ' Nonlinearities in single-crystal silicon micromechanical resonators ', Proc. IEEE Int. Conf. on Solid-State Sensors, Actuators and Microsystems, June 2003
6. Nathanson, H.: et al. ' The resonant gate transistor ', IEEE Trans. Electron Devices, 1967, 3, p. 117-133