Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications

IEEE Electron Device Letters

Volumn 27, Issue 6, 2006, Pages 495-497

  Verd, J ^a   Uranga, Arantxa ^a   Teva, J ^a   Lopez J L ^a   Torres, F ^a   Esteve, J ^b   Abadal, G ^a   Pérez Murano, Frances ^b   Barniol, N ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

CMOS microelectromechanical system (MEMS); High frequency resonators; Integrated resonators; Mechanical resonators

Indexed keywords

APPLICATION SPECIFIC INTEGRATED CIRCUITS; CHIP SCALE PACKAGES; HIGH FREQUENCY AMPLIFIERS; INTEGRATED CIRCUIT LAYOUT; MICROELECTROMECHANICAL DEVICES; RESONATORS;

HIGH-FREQUENCY RESONATORS; INTEGRATED RESONATORS; MECHANICAL RESONATORS; ON-CHIP READOUT ELECTRONICS;

MONOLITHIC MICROWAVE INTEGRATED CIRCUITS;

EID: 33744758970     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2006.875147     Document Type: Article

References (9)

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