A CMOS-MEMS RF-tunable bandpass filter based on two high-Q 22-MHz polysilicon clamped-clamped beam resonators

IEEE Electron Device Letters

Volumn 30, Issue 7, 2009, Pages 718-720

  Lopez, Joan Lluis ^a   Verd, Jaume ^b   Uranga, Arantxa ^a   Giner, Joan ^a   Murillo, Gonzalo ^a   Torres, Francesc ^a   Abadal, Gabriel ^a   Barniol, Nuria ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b UNIVERSITAT DE LES ILLES BALEARS   (Spain)

Author keywords

Bandpass filter; CMOS MEMS; Micromechanical filter; System on chip

Indexed keywords

AIR CONDITIONS; CLAMPED-CLAMPED BEAM; CMOS COMPATIBLE; CMOS PROCESS; CMOS-MEMS; FULLY INTEGRATED; HIGH QUALITY FACTORS; MEMS RESONATORS; MICROMECHANICAL FILTER; MONOLITHICALLY INTEGRATED; ON CHIPS; RESONANCE FREQUENCIES; SHAPE FACTOR; STATE OF THE ART; STOPBAND; SUBMICROMETER; SYSTEM-ON-CHIP; TUNABLE BANDPASS FILTER;

APPLICATION SPECIFIC INTEGRATED CIRCUITS; BANDPASS FILTERS; BIAS VOLTAGE; CRYSTAL RESONATORS; DIFFERENTIAL AMPLIFIERS; ELECTROMECHANICAL FILTERS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL FILTERS; POLYSILICON; PROGRAMMABLE LOGIC CONTROLLERS; RESONANCE; VACUUM;

AIR FILTERS;

EID: 67650355039     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2009.2022509     Document Type: Article

References (17)

1. C. T. C. Nguyen, "Integrated micromechanical circuits for RF front ends," in Proc. 36th ESSDERC, 2006, pp. 7-16.
2. S.-S. Li, Y.-W. Lin, X. Yuan, R. Zeying, and C. T. C. Nguyen, "Micromechanical "hollow-disk" ring resonators," in Proc. 17th IEEE Int. Conf. MEMS, 2004, pp. 821-824.
3. G. K. Fedder, R. T. Howe, T.-J. K. Liu, and E. P. Quevy, "Technologies for cofabricating MEMS and electronics," Proc. IEEE, vol. 96, no. 2, pp. 306-322, Feb. 2008.
4. J. Teva, G. Abadal, A. Uranga, J. Verd, F. Torres, J. L. Lopez, J. Esteve, F. Perez-Murano, and N. Barniol, "VHF CMOS-MEMS resonator monolithically integrated in a standard 0.35 μm CMOS technology," in Proc. IEEE 20th Int. Conf. MEMS, 2007, pp. 779-782.
5. J. Verd, A. Uranga, G. Abadal, J. Teva, F. Torres, J. L. Lopez, F. Perez-Murano, J. Esteve, and N. Barniol, "Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range," IEEE Electron Device Lett., vol. 29, no. 2, pp. 146-148, Feb. 2008.
6. L. Lin, C. T. C. Nguyen, R. T. Howe, and A. P. Pisano, "Microelectromechanical filters for signal processing," in Proc. IEEE MEMS - An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot, 1992, pp. 226-231.
7. H. A. C. Tilmans, D. J. Ijntema, and J. H. J. Fluitman, "Single element excitation and detection of (micro-)mechanical resonators," in Proc. Int. Conf. Solid-State Sens. Actuators, Dig. Tech. Papers, TRANSDUCERS 1991, pp. 533-537.
8. J. Verd, A. Uranga, J. Teva, J. L. Lopez, F. Torres, J. Esteve, G. Abadal, F. Perez-Murano, and N. Barniol, "Integrated CMOS-MEMS with onchip readout electronics for high-frequency applications," IEEE Electron Device Lett., vol. 27, no. 6, pp. 495-497, Jun. 2006.
9. J. L. Lopez, J. Verd, J. Teva, G. Murillo, J. Giner, F. Torres, A. Uranga, G. Abadal, and N. Barniol, "Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies," J. Micromech. Microeng., vol. 19, no. 1, p. 015 002, Jan. 2009.
10. J. Teva, G. Abadal, A. Uranga, J. Verd, F. Torres, J. L. Lopez, J. Esteve, F. Perez-Murano, and N. Barniol, "From VHF to UHF CMOS-MEMS monolithically integrated resonators," in Proc. IEEE 21st Int. Conf. MEMS, 2008, pp. 82-85.
11. V. Kaajakari, T. Mattila, A. Oja, and H. Seppa, "Nonlinear limits for single-crystal silicon microresonators," J. Microelectromech. Syst. vol. 13, no. 5, pp. 715-724, Oct. 2004.
12. C. C. Lo and G. K. Fedder, "On-chip high quality factor CMOS-MEMS silicon-fin resonators," in Proc. Int. Solid-State Sens., Actuators Microsyst. Conf., TRANSDUCERS, 2007, pp. 2449-2452.
13. W. T. Hsu, J. R. Clark, and C. T. C. Nguyen, "Q-optimized lateral free-free beam micromechanical resonators," in Proc. Eurosensors Xv, Dig. Tech. Papers, Transducers, Berlin, Germany, 2001, vol. 1/2, pp. 1110-1113.
14. A. Uranga, J. Verd, J. L. Lopez, J. Teva, G. Abadal, F. Torres, J. Esteve, F. Perez-Murano, and N. Barniol, "Fully integrated MIXLER based on VHF CMOS-MEMS clamped-clamped beam resonator," Electron. Lett. vol. 43, no. 8, pp. 452-454, Apr. 2007.
15. J. Yan, A. A. Seshia, K. L. Phan, and J. T. M. van Beek, "Internal electrical phase inversion for FF-beam resonator arrays and tuning fork filters," in Proc. IEEE 21st Int. Conf. MEMS, 2008, pp. 1028-1031.
16. N. Arellano, E. P. Quevy, J. Provine, R. Maboudian, and R. T. Howe, "Silicon nanowire coupled micro-resonators," in Proc. IEEE 21st Int. Conf. MEMS, 2008, pp. 721-724.
17. S.-S. Li, Y.-W. Lin, Z. Ren, and C. T. C. Nguyen, "An MSI micromechanical differential disk-array filter," in Proc. Int. Solid-State Sens., Actuators Microsyst. Conf., TRANSDUCERS, 2007, pp. 307-311.