Integrated HF CMOS-MEMS square-frame resonators with on-chip electronics and electrothermal narrow gap mechanism

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 2074-2077

  Lo, Chiung Cheng ^a   Chen, Fang ^a   Fedder, G K ^a,b  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

CMOS MEMS; HF; Integrated resonator; RF MEMS

Indexed keywords

DIFFERENTIAL AMPLIFIERS; ELECTRIC CURRENTS; ELECTRODES; MICROELECTROMECHANICAL DEVICES; RESONANCE; RESONATORS; VACUUM;

CMOS-MEMS; ELECTROTHERMAL ACTUATED ELECTRODES; INTEGRATED RESONATORS; RF MEMS;

CMOS INTEGRATED CIRCUITS;

EID: 27544512689     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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