Superhard coatings of CNx/ZrN multilayers prepared by DC magnetron sputtering

Thin Solid Films

Volumn 308-309, Issue 1-4, 1997, Pages 113-117

  Wu, Mei Ling ^a   Qian, Wei Da ^a   Chung, Yip Wah ^a   Wang, Yun Yu ^b,c   Wong, Ming Show ^b   Sproul, William D ^b,d  

^a Northwestern University   (United States)

^b NORTHWESTERN UNIVERSITY   (United States)

^c IBM   (United States)

^d Sputtered Films Inc   (United States)

Author keywords

Hardness; Magnetron sputtering; Nanoindentor; X ray diffraction

Indexed keywords

CRYSTALLINE MATERIALS; ELASTIC MODULI; FILM PREPARATION; HARDNESS; MAGNETRON SPUTTERING; MULTILAYERS; SPUTTER DEPOSITION; TEXTURES; TRANSMISSION ELECTRON MICROSCOPY; X RAY CRYSTALLOGRAPHY; ZIRCONIUM COMPOUNDS;

NANOINDENTOR;

AMORPHOUS FILMS;

EID: 0031248722     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00429-X     Document Type: Article

References (17)

1. A.Y. Liu and M.L. Cohen, Science, 245 (1989) 841.
2. A.Y. Liu and M.L. Cohen, Phys. Rev., B41 (1990) 10727.
3. J.J. Cuomo, P.A. Leary, D. Yu, W. Reuter and M. Frisch, J. Vac. Sci. Technol., 16 (1979) 299.
4. H.X. Han and B. J. Feldman, Solid State Commun., 65 (1988) 921.
5. J.H. Kaufman, S. Metin and D.D. Saperstein, Phys. Rev. B, 39 (1989) 13053.
6. M.Y. Chen, D. Li, X. Lin, V.P. Dravid, Y.W. Chung, M.S. Wong and W.D. Sproul, J. Vac. Sci. Technol. A, 11 (1993) 521.
7. N. Nakayama, T. Tsuchiya, S. Tamada, K. Kosuge, S. Nagata, K. Takahiro and S. Yamaguchi, Jpn. J. Appl. Phys., 32 (1993) 1465.
8. C. Niu, Y.Z. Lu and C.M. Lieber, Science, 261 (1993) 334.
9. K.M. Yu, M.L. Cohen, E.E. Haller, W. L. Hansen, A. Y Liu and I. C. Wu, Phys. Rev. B, 49 (1994) 5034.
10. S. Kumar and T. L. Transley, J. Appl. Phys., 76 (1994) 4390.
11. H. Sjöström, L. Hultman, J.E. Sundgren, S. V. Hainsworth, T.F. Page and G.S.A.M. Theunussen, J. Vac. Sci. Technol. A, 14 (1996) 56.
12. D. Li, X. Chu, S.C. Cheng, X. Lin, V.P. Dravid and Y.W. Chung, Appl. Phys. Lett., 67, (1995) 203.
13. D. Li, X. Chu, S.C. Cheng, X. Lin, V.P. Dravid and Y.W. Chung, Appl. Phys. Lett., 68 (1996) 1211.
14. W.D. Sproul, P.J. Rudnik, M.E. Graham and S.L. Rohde, Surf. Coat. Technol., 43/44 (1990) 279.
15. W. C. Oliver and G. M. Pharr, J. Mater. Rev., 7(6) (1992) 1564.
16. G.M. Pharr and W. C. Oliver, MRS Bulletin, XVII (1992) 28.
17. M.Y. Chen, X. Lin, V.P Dravid, Y.W. Chung, M.S. Wong and W.D. Sproul, Tribo. Trans., 36(3) (1993) 491.