Template-induced crystallization of amorphous Si O2 and its effects on the mechanical properties of TiNSi O2 nanomultilayers

Applied Physics Letters

Volumn 86, Issue 2, 2005, Pages

  Wei, Lun ^a   Mei, Fanghua ^a   Shao, Nan ^a   Kong, Ming ^a   Li, Geyang ^a   Li, Jianguo ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; EPITAXIAL GROWTH; FABRICATION; HARDNESS; HIGH RESOLUTION ELECTRON MICROSCOPY; MAGNETRON SPUTTERING; MULTILAYERS; OXIDATION; STABILITY; TITANIUM NITRIDE; X RAY DIFFRACTION;

CRYSTALLINE MODULATION; HARDNESS ENHANCEMENT; NANOINDENTATIN HARDNESS; STRUCTURAL STABILITY;

SILICA;

EID: 19744383392     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1853512     Document Type: Article

References (17)

1. W. D. Sproul, Science 273, 889 (1996).
2. U. Helmersson, S. Todorova, and S. A. Barnett, J. Appl. Phys. 62, 481 (1987).
3. J. H. Xu, M. Kamiko, Y. M. Zhou, R. Yamamoto, G. Y. Li, and M. Y. Gu, J. Appl. Phys. 89, 3674 (2001).
4. K. W. Lee, Y. H. Chen, Y. W. Chung, and L. M. Keer, Surf. Coat. Technol. 177-178, 591 (2004).
5. P. Yashar, S. A. Barnett, L. Hultman, and W. D. Sproul, J. Mater. Res. 14, 3614 (1999).
6. J. J. Lao, M. Kong, H. J. Zhang, and G. Y. Li, Acta Phys. Sin. 53, 1961 (2004).
7. D. Li, X. W. Lin, S. C. Cheng, V. P. Dravid, Y. W. Chung, M. S. Wong, and W. D. Sproul, Appl. Phys. Lett. 68, 1211 (1996).
8. A. Madan, I. W. Kim, S. C. Cheng, P. Yashar, V. P. Dravid, and S. A. Barnett, Phys. Rev. Lett. 78, 1743 (1997).
9. G. Y. Li, J. J. Lao, J. W. Tian, Z. H. Han, and M. Y. Gu, J. Appl. Phys. 95, 92 (2004).
10. I. W. Kim, Q. Li, L. D. Marks, and S. A. Barnett, Appl. Phys. Lett. 78, 892 (2001).
11. P. Yashar, X. Chu, S. A. Barnett, J. Rechner, Y. Y. Wang, M. S. Wong, and W. D. Sproul, Appl. Phys. Lett. 72, 987 (1998).
12. M. Larsson, P. Hollman, P. Hedengvist, S. Hogmark, U. Wahlstrom, and L. Hultman, Surf. Coat. Technol. 86-87, 351 (1996).
13. Z. Y. Zhang and M. G. Lagally, Science 276, 377 (1997).
14. J. S. Koehler, Phys. Rev. B 2, 547 (1970).
15. S. A. Barnett, in Physics of Thin Films, edited by, M. Francombe, and, J. A. Vossen, (Academic, New York, 1993), p. 1.
16. M. Kato, T. Mori, and L. H. Schwartz, Acta Metall. 28, 285 (1980).
17. P. M. Andson and C. Li, Nanostruct. Mater. 5, 349 (1995).