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Volumn 518, Issue 17, 2010, Pages 4890-4897

Transmission electron microscopy characterization of TiN/SiNx multilayered coatings plastically deformed by nanoindentation

(3) Parlinska Wojtan, M a,b Meier, S c Patscheider, J a

a Laboratory for Nanoscale Materials Science (Switzerland)

b Empa (Switzerland)

c Laboratory of Electronics and Metrology (Switzerland)

Author keywords

Multilayer thin films; Severe plastic deformation (SPD); Shear sliding; Titanium nitride; Transmission electron microscopy (TEM)

Indexed keywords

BI-LAYER; DEFORMATION BEHAVIOUR; DEFORMATION MECHANISM; DISLOCATION ACTIVITY; FAILURE MECHANISM; FCC STRUCTURES; HORIZONTAL FRACTURES; INDENTERS; MULTI-LAYER THIN FILM; MULTILAYERED COATINGS; PREFERENTIAL ORIENTATION; SEVERE PLASTIC DEFORMATION (SPD); SEVERE PLASTIC DEFORMATIONS; SHEAR SLIDING; TIN LAYERS; TRANSMISSION ELECTRON; VERTICAL CRACK; VERTICAL DISPLACEMENTS;

CRYSTAL GROWTH; CRYSTAL ORIENTATION; DISLOCATIONS (CRYSTALS); ELECTRONS; FILM PREPARATION; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; MULTILAYER FILMS; MULTILAYERS; NANOINDENTATION; PLASTIC COATINGS; PLASTIC DEFORMATION; SILICON NITRIDE; TITANIUM; TRANSMISSION ELECTRON MICROSCOPY;

TITANIUM NITRIDE;

EID: 77955657912 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2010.02.064 Document Type: Article

Times cited : (20)

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