Synthesis and characterization of CNx/TiN multilayers on Si(100) substrates

Surface and Coatings Technology

Volumn 200, Issue 7, 2005, Pages 2293-2300

  Vyas, A ^a   Li, K Y ^a   Zhou, Z F ^a   Shen, Y G ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

CNx TiN Multilayer; Hardness; Internal stress; Magnetron sputtering; Transmission electron microscopy; X ray photoelectron spectroscopy

Indexed keywords

CARBON NITRIDE; MAGNETRON SPUTTERING; MICROHARDNESS; MULTILAYERS; RESIDUAL STRESSES; SILICON; SUBSTRATES; SYNTHESIS (CHEMICAL); TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

LOW ANGLE X-RAY SCATTERING; SILICON SUBSTRATES;

INORGANIC COATINGS;

COATING;

EID: 29244476242     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.10.015     Document Type: Article

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