Crystallization of amorphous SiC and superhardness effect in TiN/SiC nanomultilayers

Applied Surface Science

Volumn 253, Issue 10, 2007, Pages 4734-4739

  Kong, Ming ^a   Dai, Jiawei ^a   Lao, Jijun ^a   Li, Geyang ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Crystallization; Epitaxial growth; Superhardness effect; TiN SiC nanomultilayers

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTALLIZATION; ENERGY DISPERSIVE SPECTROSCOPY; EPITAXIAL GROWTH; MAGNETRON SPUTTERING; MICROSTRUCTURE; MULTILAYERS; SCANNING ELECTRON MICROSCOPY; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY;

COLUMNAR STRUCTURES; NANOINDENTATION HARDNESS; SUPERHARDNESS EFFECT; TIN/SIC NANOMULTILAYERS;

SILICON CARBIDE;

EID: 33847069586     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.10.050     Document Type: Article

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