SCOPUS 정보 검색 플랫폼

Volumn 12, Issue 9, 2010, Pages 920-925

The effect of stress relaxation on the microstructure and hardness evolution of pure amorphous-carbon and C/Ti multilayer films

(7) Hong, Chunfu a Tu, Jiangping a Gu, Changdong a Zheng, Xiaohua b Liu, Dongguang a Li, Ruiling a Mao, Scott X a,c

a ZHEJIANG UNIVERSITY (China)

b ZHEJIANG UNIVERSITY OF TECHNOLOGY (China)

c University of Pittsburgh (United States)

Author keywords

[No Author keywords available]

Indexed keywords

A-C FILM; BI-LAYER; BOND RATIO; FLUENCES; INTERNAL STRESS; NANO-SIZED;

AMORPHOUS CARBON; AMORPHOUS FILMS; CARBON FILMS; FILM PREPARATION; HARDNESS; MICROSTRUCTURE; MULTILAYERS; PULSED LASER DEPOSITION; PULSED LASERS; RESIDUAL STRESSES; STRESS RELAXATION; THICK FILMS; VAPOR DEPOSITION;

MULTILAYER FILMS;

EID: 78249236881 PISSN: 14381656 EISSN: 15272648 Source Type: Journal
DOI: 10.1002/adem.201000102 Document Type: Article

Times cited : (14)

References (35)

1
- 65249176760
- Y. Miyajima, S. J. Henley, G. Adamopoulos, V. Stolojan, E. Garcia-Caurel, B. Drevillon, J. M. Shannon, S. R. P. Silva, J. Appl. Phys. 2009, 105, 073521.
- (2009) J. Appl. Phys. , vol.105 , pp. 073521
- Miyajima, Y.¹ Henley, S.J.² Adamopoulos, G.³ Stolojan, V.⁴ Garcia-Caurel, E.⁵ Drevillon, B.⁶ Shannon, J.M.⁷ Silva, S.R.P.⁸

2
- 1542425323
- A. S. Loir, F. Garrelie, C. Donnet, M. Belin, B. Forest, F. Rogemond, P. Laporte, Thin Solid Films 2004, 453, 531.
- (2004) Thin Solid Films , vol.453 , pp. 531
- Loir, A.S.¹ Garrelie, F.² Donnet, C.³ Belin, M.⁴ Forest, B.⁵ Rogemond, F.⁶ Laporte, P.⁷

3
- 34247378234
- A. Hu, Q. B. Lu, W. W. Duley, M. Rybachuk, J. Chem. Phys. 2007, 126, 154705.
- (2007) J. Chem. Phys. , vol.126 , pp. 154705
- Hu, A.¹ Lu, Q.B.² Duley, W.W.³ Rybachuk, M.⁴

4
- 21744446869
- T. Katsuno, C. Godet, J. C. Orlianges, A. S. Loir, F. Garrelie, A. Catherinot, Appl. Phys. A-Mater. Sci. Process. 2005, 81, 471.
- (2005) Appl. Phys. A-Mater. Sci. Process. , vol.81 , pp. 471
- Katsuno, T.¹ Godet, C.² Orlianges, J.C.³ Loir, A.S.⁴ Garrelie, F.⁵ Catherinot, A.⁶

5
- 0030212370
- A. A. Voevodin, M. S. Donley, Surf. Coat. Technol. 1996, 82, 199.
- (1996) Surf. Coat. Technol. , vol.82 , pp. 199
- Voevodin, A.A.¹ Donley, M.S.²

6
- 63749116892
- C. Matta, O. L. Eryilmaz, M. I. D. Bouchet, A. Erdemir, J. M. Martin, K. Nakayama, J. Phys. D: Appl. Phys. 2009, 42, 075307.
- (2009) J. Phys. D: Appl. Phys. , vol.42 , pp. 075307
- Matta, C.¹ Eryilmaz, O.L.² Bouchet, M.I.D.³ Erdemir, A.⁴ Martin, J.M.⁵ Nakayama, K.⁶

7
- 29744456782
- S. J. Henley, J. D. Carey, S. R. P. Silva, G. M. Fuge, M. N. R. Ashfold, D. Anglos, Phys. Rev. B: Condens. Matter 2005, 72, 205413.
- (2005) Phys. Rev. B: Condens. Matter , vol.72 , pp. 205413
- Henley, S.J.¹ Carey, J.D.² Silva, S.R.P.³ Fuge, G.M.⁴ Ashfold, M.N.R.⁵ Anglos, D.⁶

8
- 34547280382
- P. Patsalas, S. Kaziannis, C. Kosmidis, D. Papadimitriou, G. Abadias, G. A. Evangelakis, J. Appl. Phys. 2007, 101, 124903.
- (2007) J. Appl. Phys. , vol.101 , pp. 124903
- Patsalas, P.¹ Kaziannis, S.² Kosmidis, C.³ Papadimitriou, D.⁴ Abadias, G.⁵ Evangelakis, G.A.⁶

9
- 0001233686
- M. P. Siegal, J. C. Barbour, P. N. Provencio, D. R. Tallant, T. A. Friedmann, Appl. Phys. Lett. 1998, 73, 759.
- (1998) Appl. Phys. Lett. , vol.73 , pp. 759
- Siegal, M.P.¹ Barbour, J.C.² Provencio, P.N.³ Tallant, D.R.⁴ Friedmann, T.A.⁵

10
- 25444529677
- F. Balon, V. Stolojan, S. R. P. Silva, M. Michalka, A. Kromka, Vacuum 2005, 80, 163.
- (2005) Vacuum , vol.80 , pp. 163
- Balon, F.¹ Stolojan, V.² Silva, S.R.P.³ Michalka, M.⁴ Kromka, A.⁵

11
- 56349100556
- C. F. Hong, J. P. Tu, R. L. Li, X. H. Zheng, Multi-Funct. Mater. Struct. 2008, 47, 617.
- (2008) Multi-Funct. Mater. Struct. , vol.47 , pp. 617
- Hong, C.F.¹ Tu, J.P.² Li, R.L.³ Zheng, X.H.⁴

12
- 33646161937
- N. Benchikh, F. Garrelie, C. Donnet, K. Wolski, R. Y. Fillit, F. Rogemond, J. L. Subtil, J. N. Rouzaud, J. Y. Laval, Surf. Coat. Technol. 2006, 200, 6272.
- (2006) Surf. Coat. Technol. , vol.200 , pp. 6272
- Benchikh, N.¹ Garrelie, F.² Donnet, C.³ Wolski, K.⁴ Fillit, R.Y.⁵ Rogemond, F.⁶ Subtil, J.L.⁷ Rouzaud, J.N.⁸ Laval, J.Y.⁹

13
- 77349124897
- X. H. Zheng, J. P. Tu, R. G. Song, Appl. Surf. Sci. 2010, 256, 3211.
- (2010) Appl. Surf. Sci. , vol.256 , pp. 3211
- Zheng, X.H.¹ Tu, J.P.² Song, R.G.³

14
- 31144442600
- R. J. Narayan, D. Scholvin, J. Vac. Sci. Technol. B 2005, 23, 1041.
- (2005) J. Vac. Sci. Technol. B , vol.23 , pp. 1041
- Narayan, R.J.¹ Scholvin, D.²

15
- 17644366807
- N. Benchikh, F. Garrelie, C. Donnet, B. Bouchet-Fabre, K. Wolski, F. Rogemond, A. S. Loir, J. L. Subtil, Thin Solid Films 2005, 482, 287.
- (2005) Thin Solid Films , vol.482 , pp. 287
- Benchikh, N.¹ Garrelie, F.² Donnet, C.³ Bouchet-Fabre, B.⁴ Wolski, K.⁵ Rogemond, F.⁶ Loir, A.S.⁷ Subtil, J.L.⁸

16
- 0031103845
- A. A. Voevodin, S. D. Walck, J. S. Zabinski, Wear 1997, 203, 516.
- (1997) Wear , vol.203 , pp. 516
- Voevodin, A.A.¹ Walck, S.D.² Zabinski, J.S.³

17
- 54349098936
- X. Han, J. Q. Zhu, J. C. Han, M. L. Tan, Z. C. Jia, C. Z. Jiang, Appl. Surf. Sci. 2008, 255, 607.
- (2008) Appl. Surf. Sci. , vol.255 , pp. 607
- Han, X.¹ Zhu, J.Q.² Han, J.C.³ Tan, M.L.⁴ Jia, Z.C.⁵ Jiang, C.Z.⁶

18
- 77950917860
- J. D. Carey, S. R. P. Silva, Phys. Rev. B: Condens. Matter 2004, 70, 8.
- (2004) Phys. Rev. B: Condens. Matter , vol.70 , pp. 8
- Carey, J.D.¹ Silva, S.R.P.²

19
- 70350655451
- D. B. Graves, P. Brault, J. Phys. D: Appl. Phys. 2009, 42, 194011.
- (2009) J. Phys. D: Appl. Phys. , vol.42 , pp. 194011
- Graves, D.B.¹ Brault, P.²

20
- 43049087060
- J. T. Titantah, D. Lamoen, J. Phys.: Condens. Matter 2008, 20, 035216.
- (2008) J. Phys.: Condens. Matter , vol.20 , pp. 035216
- Titantah, J.T.¹ Lamoen, D.²

21
- 0037370371
- A. Y. Belov, Comput. Mater. Sci. 2003, 27, 30.
- (2003) Comput. Mater. Sci. , vol.27 , pp. 30
- Belov, A.Y.¹

22
- 0000648081
- Y. Lifshitz, Diamond Relat. Mater. 1996, 5, 388.
- (1996) Diamond Relat. Mater. , vol.5 , pp. 388
- Lifshitz, Y.¹

23
- 18444418888
- G. K. Pearce, N. A. Marks, D. R. McKenzie, M. M. M. Bilek, Diamond Relat. Mater. 2005, 14, 921.
- (2005) Diamond Relat. Mater. , vol.14 , pp. 921
- Pearce, G.K.¹ Marks, N.A.² McKenzie, D.R.³ Bilek, M.M.M.⁴

24
- 0001527185
- M. Chhowalla, Y. Yin, G. A. J. Amaratunga, D. R. McKenzie, T. Frauenheim, Appl. Phys. Lett. 1996, 69, 2344.
- (1996) Appl. Phys. Lett. , vol.69 , pp. 2344
- Chhowalla, M.¹ Yin, Y.² Amaratunga, G.A.J.³ McKenzie, D.R.⁴ Frauenheim, T.⁵

25
- 62349096862
- J. M. Pureza, M. M. Lacerda, A. L. De Oliveira, J. F. Fragalli, R. A. S. Zanon, Appl. Surf. Sci. 2009, 255, 6426.
- (2009) Appl. Surf. Sci. , vol.255 , pp. 6426
- Pureza, J.M.¹ Lacerda, M.M.² De Oliveira, A.L.³ Fragalli, J.F.⁴ Zanon, R.A.S.⁵

26
- 31644448079
- P. K. Chu, L. H. Li, Mater. Chem. Phys. 2006, 96, 253.
- (2006) Mater. Chem. Phys. , vol.96 , pp. 253
- Chu, P.K.¹ Li, L.H.²

27
- 0003909387
- in, JEOL (Tokyo)
- N. Ikeo, Y. Iijima, N. Nimura, M. Sigematsu, T. Tazawa, S. Matsumoto, K. Kojima, Y. Nagasawa, in Handbook of X-ray Photoelectron Spectroscopy, JEOL (Tokyo) 1991, p. 6.
- (1991) Handbook of X-ray Photoelectron Spectroscopy , pp. 6
- Ikeo, N.¹ Iijima, Y.² Nimura, N.³ Sigematsu, M.⁴ Tazawa, T.⁵ Matsumoto, S.⁶ Kojima, K.⁷ Nagasawa, Y.⁸

28
- 0242603790
- A. C. Ferrari, J. Robertson, Phys. Rev. B: Condens. Matter 2000, 61, 14095.
- (2000) Phys. Rev. B: Condens. Matter , vol.61 , pp. 14095
- Ferrari, A.C.¹ Robertson, J.²

29
- 0035882062
- A. C. Ferrari, J. Robertson, Phys. Rev. B: Condens. Matter 2001, 64, 075414.
- (2001) Phys. Rev. B: Condens. Matter , vol.64 , pp. 075414
- Ferrari, A.C.¹ Robertson, J.²

30
- 0036508145
- A. C. Ferrari, Diamond Relat. Mater. 2002, 11, 1053.
- (2002) Diamond Relat. Mater. , vol.11 , pp. 1053
- Ferrari, A.C.¹

31
- 25144469764
- G. Irmer, A. Dorner-Reisel, Adv. Eng. Mater. 2005, 7, 694.
- (2005) Adv. Eng. Mater. , vol.7 , pp. 694
- Irmer, G.¹ Dorner-Reisel, A.²

32
- 0000075431
- T. A. Friedmann, J. P. Sullivan, J. A. Knapp, D. R. Tallant, D. M. Follstaedt, D. L. Medlin, P. B. Mirkarimi, Appl. Phys. Lett. 1997, 71, 3820.
- (1997) Appl. Phys. Lett. , vol.71 , pp. 3820
- Friedmann, T.A.¹ Sullivan, J.P.² Knapp, J.A.³ Tallant, D.R.⁴ Follstaedt, D.M.⁵ Medlin, D.L.⁶ Mirkarimi, P.B.⁷

33
- 2442545313
- G. A. Abbas, P. Papakonstantinou, J. A. McLaughlin, Diamond Relat. Mater. 2004, 13, 1486.
- (2004) Diamond Relat. Mater. , vol.13 , pp. 1486
- Abbas, G.A.¹ Papakonstantinou, P.² McLaughlin, J.A.³

34
- 34247648630
- P. Wang, X. Wang, T. Xu, W. M. Liu, J. Y. Zhang, Thin Solid Films 2007, 515, 6899.
- (2007) Thin Solid Films , vol.515 , pp. 6899
- Wang, P.¹ Wang, X.² Xu, T.³ Liu, W.M.⁴ Zhang, J.Y.⁵

35
- 0000400344
- R. Haerle, G. Galli, A. Baldereschi, Appl. Phys. Lett. 1999, 75, 1718.
- (1999) Appl. Phys. Lett. , vol.75 , pp. 1718
- Haerle, R.¹ Galli, G.² Baldereschi, A.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.