Sub-nm accuracy metrology for ultra-precise reflective X-ray optics

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 635, Issue 1 SUPPL., 2011, Pages

  Siewert, F ^a   Buchheim, J ^a   Zeschke, T ^a   Brenner, G ^b   Kapitzki, S ^b   Tiedtke, K ^b  

^a HAHN MEITNER INSTITUT   (Germany)

^b DESY   (Germany)

Author keywords

FEL; LTP; Metrology; NOM; Synchrotron radiation; X ray optics

Indexed keywords

BEAM LINES; ELLIPTICAL CYLINDER; EXPERIMENTAL STATIONS; FEL; HELMHOLTZ; LTP; MEASURING MACHINES; METROLOGY; MICRO-ROUGHNESS; MONOCHROMATIZATION; NM ACCURACY; NOM; OPTICAL COMPONENTS; OPTICAL ELEMENTS; OPTICS LABORATORY; PLANE MIRRORS; SLOPE ERRORS; SYNCHROTRON LIGHT;

CYLINDERS (SHAPES); MIRRORS; SYNCHROTRON RADIATION; SYNCHROTRONS; X RAY OPTICS; X RAYS;

UNITS OF MEASUREMENT;

EID: 79952534341     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2010.10.137     Document Type: Conference Paper

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