Performance of the upgraded LTP-II at the ALS Optical Metrology Laboratory

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7077, Issue , 2008, Pages

  Kirschman, Jonathan L ^a   Domning, Edward E ^a   McKinney, Wayne R ^a   Morrison, Gregory Y ^a   Smith, Brian V ^a   Yashchuk, Valeriy V ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

2D detector; Error; Long trace profiler; LTP; Slope measuring instrument; Systematic error reduction

Indexed keywords

CHARGE COUPLED DEVICES; CONTROL SYSTEMS; FREE ELECTRON LASERS; INSTRUMENTS; LANDING; LASERS; OPTICAL SYSTEMS;

2D DETECTOR; LONG TRACE PROFILER; LTP; SLOPE MEASURING INSTRUMENT; SYSTEMATIC ERROR REDUCTION;

LIGHT;

EID: 56249095811     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.796335     Document Type: Conference Paper

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