Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining

Review of Scientific Instruments

Volumn 73, Issue 11, 2002, Pages 4028-

  Yamauchi, Kazuto ^a   Mimura, Hidekazu ^a   Inagaki, Kouji ^a   Mori, Yuzo ^a  

^a OSAKA UNIVERSITY   (Japan)

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Indexed keywords

EID: 0036857959     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1510573     Document Type: Article

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