Finishing procedure for high performance synchrotron optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5180, Issue , 2003, Pages 64-72

  Schindler, Axel ^a   Haensel, Thomas ^a   Nickel, Andreas ^a   Thomas, Hans Juergen ^a   Lammert, Heiner ^b   Siewert, Frank ^b  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^b HAHN MEITNER INSTITUT   (Germany)

Author keywords

Ion beam finishing; Synchrotron beam line optics

Indexed keywords

ERRORS; INTERFEROMETRY; ION BEAMS; OPTICAL DEVICES; POLISHING; PROFILOMETRY; SURFACE MEASUREMENT; SURFACE ROUGHNESS; SYNCHROTRON RADIATION; SYNCHROTRONS;

ION BEAM MILLING TECHNOLOGY; SURFACE SHAPE MEASUREMENTS; SYNCHROTRON RADIATION SOURCES;

OPTICS;

EID: 1842556549     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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