Latest metrology results with the SOLEIL synchrotron LTP

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5921, Issue , 2005, Pages 1-9

  Thomasset, Muriel ^a   Brochet, Sylvain ^a   Polack, François ^a  

^a SYNCHROTRON SOLEIL   (France)

Author keywords

Absolute calibration; Grating; Long Trace Profiler; Mirror; Slope errors; Surface figure

Indexed keywords

LONG TRACE PROFILER (LTP); SURFACE FIGURE;

ACOUSTIC NOISE; DATA ACQUISITION; INTERFEROMETRY; SYNCHROTRONS; TURBULENCE;

PROFILOMETRY;

EID: 31844437666     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.621073     Document Type: Conference Paper

References (4)

1. Frank Siewert, Tino Noll, Thomas Schlegel, Thomas Zeschke and Heiner Lammert, The Nanometer Optical Component Measuring Machine: a new Sub-nm Topography Measuring Device for X-rax Optics at BESSY, Mellville, New York, 2004, AIP Conference Proceedings, Volume 705, p. 847-850
2. Shinan Quian, Werner Jark and Peter takacs, The penta-prism LTP: a long trace profiler with stationary optical head and movingpenta-prism, Rev. Sci. Instrum., 66(3), 1995, p.2562.
3. Shinan Quian, Giovanni Sostero, Peter Takacs, Precision calibration and systematic error reduction in the LTP, Opt. Eng. 39(1), p.304.
4. Muriel Thomasset, Daniele Cocco, Frank Siewert, Amparo Rommeveaux, Veit Schoenherr, First report on a European Round Robin for Slope measuring Profilers, this conference, manuscript 5921-20