Characterization and calibration of 2nd generation slope measuring profiler

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 616, Issue 2-3, 2010, Pages 119-127

  Siewert, Frank ^a   Buchheim, Jana ^a   Zeschke, Thomas ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

Long trace profiler; Metrology; NOM; Synchrotron radiation; X ray optics

Indexed keywords

3RD GENERATION; BEAM-LINES; CURVED SURFACES; ELLIPTICAL CYLINDER; FINISHING TECHNOLOGY; HELMHOLTZ; HIGH SPECTRAL RESOLUTION; LONG TRACE PROFILER; MEASURING MACHINES; METROLOGY INSTRUMENTS; MICRO-ROUGHNESS; OPTICAL COMPONENTS; OPTICAL ELEMENTS; OPTICS LABORATORY; PLANE MIRRORS; SLOPE ERRORS; SLOPE MEASURING INSTRUMENT;

FREE ELECTRON LASERS; LASERS; MEASUREMENTS; OPTICAL DEVICES; SYNCHROTRON RADIATION; SYNCHROTRONS;

OPTICS;

EID: 77950860796     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2009.12.033     Document Type: Article

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