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Volumn 616, Issue 2-3, 2010, Pages 207-211
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An LTP stitching procedure with compensation of instrument errors: Comparison of SOLEIL and ESRF results on strongly curved mirrors
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Author keywords
Calibration; Data processing; Figure error; Instrument error; Linearity; Long trace profiler; Optical surface; Slope error
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Indexed keywords
CALIBRATION DATA;
CURVED MIRROR;
CURVED SURFACES;
FIGURE ERROR;
INDEPENDENT MEASUREMENT;
LINEARITY ERRORS;
LONG TRACE PROFILER;
OPTICAL SURFACES;
SLOPE PROFILE;
CALIBRATION;
DATA ACQUISITION;
INSTRUMENTS;
LASER OPTICS;
LINEARIZATION;
MEASUREMENT ERRORS;
MIRRORS;
OPTICAL DESIGN;
INSTRUMENT ERRORS;
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EID: 77950934544
PISSN: 01689002
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nima.2009.10.166 Document Type: Article |
Times cited : (44)
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References (5)
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