Deflectometric Measurements of Synchrotron-Optics for Postprocessing

AIP Conference Proceedings

Volumn 705, Issue , 2004, Pages 843-846

  Illemann, Jens ^a,b   Wurm, Matthias ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b Möller Wedel Optical GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85012305513     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.1757927     Document Type: Conference Paper

References (10)

1. BESSY: Berliner Elektronenspeicherringgesellschaft für Synchrotronstrahlung, http://www.bessy. de
2. H. Lammert, F. Senf, M. Berger, "Improvement of synchrotron radiation mirrors below the 0. 1 arcsec rms slope error limit with the help of a long trace profiler," Proc. SPIE, 3152 , 168-179, 1997
3. M. Schulz, R. D. Geckeler, J. Illemann, "High accuracy form measurement of large optical surfaces," Proc. SPIE, 5190, 2003, in print
4. R. D. Geckeler, I. Weingärtner, "Sub-nm topography measurement by deflectometry: flatness standard and wafer nanotopography," Proc. SPIE, 4779, 1-12, 2002
5. R. D. Geckeler, A. Just, R. Probst, I. Weingärtner, "Sub-nm-Topographiemessung mit hochgenauen Autokollimatoren," Techn. Messen, 69, 535-541, 2002
6. J. Illemann, R. D. Geckeler, I. Weingärtner, C. Schlewitt, B. Grubert, O. Schnabel, "Topography measurement of nanometer synchrotron-optics," Proc. SPIE, 4782, 29-37, 2002
7. J. Illemann, "Absolute high-accuracy deflectometric measurement of topography," Proc. SPIE, 5188, 2003, in print
8. C. Elster, I. Weingärtner, "Solution to the shearing problem," Appl. Optics, 38, 5024-5031, 1999
9. I. Weingärtner, M. Schulz, C. Elster, "Novel scanning technique for ultra-precise measurement of topography," Proc. SPIE, 3782, 306-317, 1999
10. C. Elster, "Evaluation of Lateral Shearing Interferograms," in "Advanced Mathematical and Computational Tools in Metrology IV," ed. by P. Ciarlini, A. B. Forbes, F. Pavese & D. Richter, World Scientific Publishing Company 2000, 76-87