The Diamond-NOM: A non-contact profiler capable of characterizing optical figure error with sub-nanometre repeatability

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 616, Issue 2-3, 2010, Pages 224-228

  Alcock, S G ^a   Sawhney, K J S ^a   Scott, S ^a   Pedersen, U ^a   Walton, R ^a   Siewert, F ^b   Zeschke, T ^b   Senf, F ^b   Noll, T ^b   Lammert, H ^b  

^a DIAMOND LIGHT SOURCE LTD   (United Kingdom)

^b HAHN MEITNER INSTITUT   (Germany)

Author keywords

Autocollimator; Diamond NOM; Metrology; Optical testing; Pentaprism; Synchrotron; X ray optics

Indexed keywords

AUTOCOLLIMATOR; AUTOCOLLIMATORS; ELASTIC EMISSION MACHINING; FIGURE ERROR; NANOMETRE RESOLUTION; NANOMETRES; NON-CONTACT PROFILERS; OPTICAL ASSEMBLIES; OPTICAL METROLOGY; SLOPE ERRORS; SYNCHROTRON MIRRORS; SYNCHROTRON X RAYS;

OPTICAL TESTING; PRISMS; SURFACE TOPOGRAPHY; SYNCHROTRONS;

DIAMONDS;

EID: 77950871847     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2009.10.137     Document Type: Article

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