Structured slope errors on real x-ray mirrors: Ray tracing versus experiment

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3152, Issue , 1997, Pages 136-147

  Signorato, Riccardo ^a   Sánchez Del Río, Manuel ^a  

^a EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

Author keywords

Mirror metrology; PSD; Ray tracing; Slope error; Synchrotron radiation beamline; X ray mirror

Indexed keywords

COMMUNICATION CHANNELS (INFORMATION THEORY); ELECTROMAGNETIC WAVES; ERRORS; OPTICAL INSTRUMENTS; POWER SPECTRAL DENSITY; PULSE SHAPING CIRCUITS; RAY TRACING; SYNCHROTRON RADIATION; SYNCHROTRONS;

MIRROR METROLOGY; PSD; SLOPE ERROR; SYNCHROTRON RADIATION BEAMLINE; X-RAY MIRROR;

MIRRORS;

EID: 0000326575     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.295553     Document Type: Conference Paper

References (16)

1. C. Welnak, G-J Chen and F. Cerrina, "SHADOW: a synchrotron radiation and x-ray optics simulation tool," Nucl. Instr. Meth. A347, pp. 344-347, 1994.
2. H. Dagnall M.A., Exploring surface texture, Rank Taylor Hobson, Leicester, 1986.
3. P. Elleaume, "Helios: a new type of linear/helical undulator," Journal of Synchrotron Radiation 1, pp. 19-26, 1994.
4. P. Elleaume, J. Chavanne, X. Marechal, J. Goulon, L. Braicovich, C. Malgrange, H. Emerich, G. Marot and J. Susini, "An Esrf beamline dedicated to polarization sensitive XAS at low excitation energies," Nucl. Instr. and Meth. A308, pp. 382-389, 1991.
5. J. Goulon, N.B. Brookes, C. Gauthier, J. Goedkoop, C. Goulon-Ginet, M. Hagelstein and A. Rogalev, "Instrumentation development for Esrf beamlines," Physica B 208/209, pp. 199-202, 1995.
6. R. Signorato, C. Goulon-Ginet, J. Goulon, A. Rogalev, J-J Fermé, "Vertically focusing reflective optics using two bendable CVD SiC mirrors," in Optics for high brightness synchrotron radiation II, Proc. SPIE 2856, 1996.
7. R. Signorato, C. Goulon-Ginet, J. Goulon, A. Rogalev, P.Marion and J-J Fermé, "Vertically focusing double mirror device (VF-2M) for the ESRF beamline ID12A," in Proceedings of XAFS IX conference, Les editions de physique, ed., J. phys IV France 7 1, pp. C2-341/342, 1997.
8. C. T. Chen, "Concept and design procedure for cylindrical element monochromators for synchrotron radiation," Nucl. Instr. and Meth. A256, pp. 595-604, 1987.
9. C. T. Chen and F. Sette, "Performance of the Dragon soft x-ray beamline," Rev. Sci. Instrum. 60(7), pp. 1616-1621, 1989.
10. J. Susini, R. Baker and A. Vivo, "Optical metrology facility at the ESRF," Rev. Sci. Instrum. 66, pp. 2232-2234, 1995.
11. O. Hignette and A. Rommeveaux, "Status of the optical metrology at the ESRF," in Optics for high brightness synchrotron radiation II, Proc. SPIE 2856, p. 315, 1996.
12. P. Takacs, "Design of a LTP; metrology figure and finish," Proc. SPIE 749, p. 59, 1987.
13. E. L. Church and P. Takacs, "Use of an optical profiling instrument for the measurement of the figure and finish of optical quality surfaces," Wear 109, pp. 241-257, 1986.
14. M. Sanchez del Rio and A. Marcelli, "Waviness effects in Ray-tracing of 'real' optical surfaces," Nucl. Instr. and Meth. A319, pp. 170-177, 1992.
15. R. Signorato et al., "Multi-segmented piezoelectric bimorph mirrors as active/adaptive optics components," Proc. SRI97, in preparation-to be published in 1998.
16. R. Signorato, Technical specifications for the ESRF beamline ID26 Vertically Focusing Mirror 3 optical polishing by SESO Inc., 1997.