Review on gallium zinc oxide films: Material properties and preparation techniques

Materials Science Forum

Volumn 671, Issue , 2011, Pages 47-68

  Nagarani, S ^a   Jayachandran, M ^b   Sanjeeviraja, C ^a  

^a ALAGAPPA UNIVERSITY   (India)

^b CENTRAL ELECTROCHEMICAL RESEARCH INSTITUTE   (India)

Author keywords

Electrical properties; Electron beam evaporation; Gallium zinc oxide; Optical properties; Structural properties; Thin film

Indexed keywords

CARRIER MOBILITY; DEPOSITION; ELECTRIC PROPERTIES; FILM PREPARATION; FUNCTIONAL MATERIALS; GALLIUM COMPOUNDS; II-VI SEMICONDUCTORS; OPTICAL PROPERTIES; OXIDE FILMS; STRUCTURAL PROPERTIES; SUBSTRATES; ZINC OXIDE;

ADVANCING TECHNOLOGY; DEPOSITION TECHNIQUE; ELECTRON BEAM EVAPORATION; GALLIUM ZINC OXIDES; PREPARATION TECHNIQUE; SUBSTRATE TEMPERATURE; SYNTHESIS OF NEW MATERIALS; THIN-FILM PROPERTIES;

THIN FILMS;

EID: 79952378237     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/MSF     Document Type: Article

References (87)

1. Kenichi Inoue, Kikuo Tominaga, Takashi Tsuduki, Michio Mikawa, Toshihiro Moriga Vacuum 83 (2009) 552.
2. H.L. Hartnagel, A.L. Dawar , A.K. Jain, C. Jagadish, Semiconducting Transparent Thin Films, p16, Institute of Physics Publ, Bristol & Philadelphia, 1995, pp. 202.
3. Yen-Chin Huang , Zhen-Yu Li , Hung-hsin Chen , Wu-Yih Uen , Shan-Ming Lan, Sen-Mao Liao , Wu-Yih Uen , Shan-Ming Lan , Sen-Mao Liao, Tsun-Neng Yang, Chin-Chen Chiang Thin Solid Films 517 (2009) 5537.
4. A.F. Kohan, G. Ceder, D. Morgan, C G. Van de Walle, Phys. Rev. B 61 (2000) 15019.
5. K.-K. Kim, S. Niki, J.-Y. Oh, J.-O. Song, T.-Y. Seong, S.-T. Park, S. Fujita, S.-W. Kim, J. Appl. Phys. 97 (2005) 066103.
6. T. Makino, Y. Segawa, S. Yoshida, A. Tsukazaki, A. Ohtomo, M. Kawasaki, Appl. Phys. Lett. 85 (2004) 759.
7. T. Minami, H. Nanto, S. Takata, Jpn. J. Appl. Phys. 23 (1984) L280.
8. K.L. Chopra, S. Major, D.K. Pandya, Thin Solid Films 102 (1983) 1.
9. Y. Li, G.S. Tompa, S. Liang, C. Gorla, Y. Lu, John Doyle, J. Vac Sci. Technol. A 15 (1997)
10. N. Ito, Y. Sato, P.K. Song, A. Kaijio, K. Inoue, Y. Shigesato, Thin Solid Films 496 (2006) 99.
11. K.Ch.Park, D.Y.Ma, K.H.Kim, The physical properties of Al-doped zinc oxide films prepared by RF magnetron sputtering. Thin Solid Films 305 (1997) 201.
12. R.G. Gordon, MRS Bull. 25 (2000) 57
13. H.J. Ko, Y.F. Chen, S.K. Hong, H. Wenisch, T. Yao, Appl. Phys. Lett. 77 (2000) 3761.
14. R.G. Gordon, MRS Bulletin 25 (2000) 52.
15. V. Assuncao, E. Fortunato, A. Marques, H. Aguas, I. Ferreira, M.E.V. Costa, R. Martins, Thin Solid Films 427 (2003) 401.
16. Milton Ohring, Material Science of Thin Films (Academic press, NewYork 2002) 121.
17. L. Maissel, Handbook on Thin Film Technology, P4-1, (Eds) L I Maissel and R. Glang McGraw Hill Book Co, New York, USA, (1970).
18. J.C.C. Fan, F.J. Bachner and G.H. Poley, Appl Phy Lett, 31 (1997) 73.
19. Lie mieo, Sakaljanemore, Shoichitoh, journal of crystal growth, 264(2004) 246.
20. Milton Ohring: Material Science of Thin Films (Academic press, NewYork 2002) 207.
21. Milton Ohring: Material Science of Thin Films (Academic press, NewYork 2002) 209.
22. Milton Ohring: Material Science of Thin Films (Academic press, NewYork 2002) 222.
23. Milton Ohring: Material Science of Thin Films (Academic press, NewYork 2002) 216.
24. R.W. Cahn (Ed), Materials science and Technology-A comprehensive treatment, Vol 15, VCH, Weinheim, FRG (1991).
25. R.K.Bedi, Proc Conference on the Physics and Technology of Semiconductor Devices and Integrated Circuits, (Eds) B.S.V. Gopalam and J.Majhi, SPIE, Vol 1523, Tata Mc Graw Hill, New Delhi (1992) 104.
26. S.K.Gandhi, R. Sivily and J.M. Borrego, Appl Phys Lett, 34 (1979) 833.
27. T.M. Ray Koov, Thin Solid Films, 164 (1987) 301.
28. E.Shanthi, A.Banerjee and K.L.Chopra, Thin Solid Films, 88 (1982) 93.
29. D.E. Bode, Proc Natl Electron Conf, 19 (1963) 630.
30. G.A. Kitaev, A.A. Uritskaya and S.G. Mokrushin, Russ J Phy Chem, 39 (1965) 1101.
31. J.C.Norris, Met Finish, 86(7) (1988) 45.
32. J.C.Norris, Met Finish, 86(8) (1988) 45.
33. K.R. Baldwin and C.J.E Smith, Plat and Surf Finish, July (1997).
34. King, R; Encyclopedia of Inorganic Chemistry. 1994, 3, 1256.
35. P.A.Lee, G. Said, R. Davis and T.H. Lim, J Phys Chem Solids, 30 (1969) 2719.
36. D.I. Bletskan, I.F. Kopinets, P.P. Pogorsh, E.N. Salkova and D.V. Chepor, Kristallografiya, 20 (1978) 1008.
37. M.F. Ladd and R.A. Palmer (Eds), Structure determination by X-ray Crystallography, Plenum Press, New York (1964) 71.
38. H.E. Bennet and J.M. Bennet in G. Hass and R. E. Thun (Eds), Physics of Thin Films Vol 4, Academic Press, New York (1967).
39. V.P. Bhatt, K. Gireesan and C.F. Desai, Cryst Res Technol, 24 (1989) 187.
40. D. Bhattacharya, S. Chaudhuri, A.K.Pal and S.K.Bhattacharya, Vacuum, 42 (1991) 1113.
41. Xuhu Yu, Jin Ma, Feng Ji, Yuheng Wang, Chuanfu Cheng, Honglei Ma, Applied Surface Science 245 (2005) 310.
42. Sungyeon Kim , Jungmok Seo , Hyeon Woo Jang , Jungsik Bang , Woong Lee , Taeyoon Lee , Jae-Min Myoung, Applied Surface Science 255 (2009) 4616.
43. F. Wu, L. Fang , Y.J. Pan , K. Zhou , L.P. Peng , Q.L. Huang , C.Y. Kong, Applied Surface Science 255 (2009) 8855.
44. Elvira Fortunato, Alexandra Goncalves, Vitor Assuncao, Antonio Marques, Hugo A guas, Luis Pereira, Isabel Ferreira, Rodrigo Martins, Thin Solid Films 442 (2003) 121.
45. Vitor Assuncao, Elvira Fortunato, António Marques, Alexandra Gonçalves, Isabel Ferreira, Hugo A' guas, Rodrigo Martins Thin Solid Films 442 (2003) 102.
46. Tadatsugu Minami, Satoshi Ida, Toshihiro Miyata, Youhei Minamino, Thin Solid Films 445 (2003) 268.
47. T. Yamada, K. Ikeda, S. Kishimoto , H. Makino, T. Yamamoto, Surface & Coatings Technology 201 (2006) 4004.
48. K.Y. Cheong, Norani Muti, S. Roy Ramanan, Thin Solid Films 410 (2002) 142.
49. K.T. Ramakrishna Reddy, T.B.S. Reddy, I. Forbes, R.W. Miles, Surface and Coatings Technology 151-152 (2002) 110.
50. P.K.Song , M.Watanabe, M.Kon , A.Mitsui , Y.Shigesato, Thin Solid Films 411 (2002) 82.
51. V. Khranovskyy, U. Grossner, V. Lazorenko, G. Lashkarev, B.G. Svensson, R. Yakimova, Superlattices and Microstructures 42 (2007) 379.
52. Quan-Bao Ma, Zhi-Zhen Ye , Hai-Ping He, Li-Ping Zhu, Jing-Rui Wang, Bing-Hui Zhao, Materials Letters 61 (2007) 2460.
53. I.A. Buyanova, X.J. Wang, W.M. Wang, C.W. Tu, W.M. Chen, Superlattices and Microstructures 45 (2009) 413.
54. Xuhu Yu, Jin MaT, Feng Ji, Yuheng Wang, Xijian Zhang, Honglei Ma, Thin Solid Films 483 (2005) 296.
55. V. Khranovskyy , U. Grossner , O. Nilsen , V. Lazorenko , G.V. Lashkarev , B.G. Svensson , R. Yakimova , Thin Solid Films 515 (2006) 472.
56. J.J. Robbins, J. Harvey, J. Leaf, C. Fry, C.A. Wolden, Thin Solid Films 473 (2005) 35.
57. Kenichi Inoue , Kikuo Tominaga , Takashi Tsuduki, Michio Mikawa , Toshihiro Moriga, Vacuum 83 (2009) 552.
58. Yen-Chin Huang , Zhen-Yu Li , Hung-hsin Chen , Wu-Yih Uen , Shan-Ming Lan , Sen-Mao Liao , Yu-Hsiang Huang , Chien-Te Ku , Meng-Chu Chen , Tsun-Neng Yang , Chin-Chen Chiang , Thin Solid Films 517 (2009) 5537.
59. Xuhu Yu, Jin Ma, Feng Ji, Yuheng Wang, Xijian Zhang, Chuanfu Cheng, Honglei Ma, Journal of Crystal Growth 274 (2005) 474.
60. Quan-Bao Ma, Zhi-Zhen Ye, Hai-Ping He, Li-Ping Zhu, Bing-Hui Zhao, Materials Science in Semiconductor Processing 10 (2007) 167.
61. H. Gomez, M. de la L. Olvera, Materials Science and Engineering B 134 (2006) 20.
62. Quan-Bao Ma, Zhi-Zhen Ye, Hai-Ping He, Jing-Rui Wang, Li-Ping Zhu, Bing-Hui Zhao, Materials Characterization 59 (2008) 124.
63. Byung Du Ahn , Jong Hoon Kim , Hong Seong Kang , Choong Hee Lee , Sang Hoon Oh, Kyoung Won Kim , Gun-eik Jang , Sang Yeol Lee, Thin Solid Films 516 (2008) 1382.
64. Hiroshi Hirasawa, Makoto Yoshida, Susumu Nakamura,Yoshio Suzuki, Satoshi Okada, Ken-ichi Kondo, Solar Energy Materials & Solar Cells 67 (2001) 231.
65. Do-Hyun Kim , Hoonha Jeon, Geumchae Kim, Suejeong Hwangboe ,Ved Prakash Verma , Wonbong Choi, Minhyon Jeon, Optics Communications 281 (2008) 2120.
66. A. Miyake , T. Yamada, H. Makino, N. Yamamoto, T. Yamamoto, Thin Solid Films 517 (2009) 3130.
67. M. de la L. Olvera, H. Gomez, A. Maldonado, Solar Energy Materials & Solar Cells 91 (2007) 1449.
68. Jiun-Yi Tseng , Ming-Yi Yang , Cheng-Yi Wang , Pin-Chou Li , Wang-Chieh Yu,Yung-Fu Hsu , Sea-Fue Wang , Yuan-Tsung Chen, Thin Solid Films 517 (2009) 6310.
69. Quan-Bao Ma, Zhi-Zhen Ye, Hai-Ping He, Shao-Hua Hu, Jing-Rui Wang, Li-Ping Zhu, Yin-Zhu Zhang, Bing-Hui Zhao, Journal of Crystal Growth 304 (2007) 64.
70. X. Yu, J. Ma, F. Ji, Y.Wang, X. Zhang, C. Cheng, H. Ma, J. Cryst. Growth 274 (2005) 474.
71. Suzuki, T. Matsushita, T. Aoki, Y. Yoneyama, M. Okuda: Jpn. J. Appl. Phys. 38 (1999) 71.
72. K. Matsubara, P. Fons, K. Iwata, A. Yamada, K. Sakurai, H. Tampo, S. Niki, Thin Solid Films 431-432 (2003) 369.
73. M. Miyazaki, K. Sato, A. Mitsui, H. Nishimura, J. Non-Cryst. Solids 218 (1997) 323.
74. M. Ohyama, H. Kozuka, T. Yoko, J. Am. Ceram. Soc. 81(1998) 1622.
75. Norihiro Sakai , Yoshihiro Umeda, Fumiaki Mitsugi, Tomoaki Ikegami, Surface & Coatings Technology 202 (2008) 5467.
76. Ding-Yeng Chen, Chun-Yao Hsu, Superlattices and Microstructures 44 (2008) 742.
77. V. Assuncao , E. Fortunato, A. Marques, H. Aguas, I. Ferreira, M.E.V. Costa, R. Martinsa, Thin Solid Films 427 (2003) 401.
78. K.Iwata , T.Sakemi , A.Yamada, P.Fons , K.Awai, T.Yamamoto, M.Matsubara , H.Tampo, K.Sakurai , S.Ishizuka , S.Niki , Thin Solid Films 451-452 (2004) 219.
79. S. Shirakata, T. Sakemi, K. Awai, T. Yamamoto, Thin Solid Films 451-452 (2004) 212.
80. S. Shirakata, T. Sakemi, K. Awai, T. Yamamoto, Thin Solid Films 445 (2003) 278.
81. T.Yamamoto, T.Sakemi , K.A wai, S.Shirakata, Thin Solid Films 451-452 (2004) 439.
82. P. Nunes, E. Fortunato , P. Vilarinho, R. Martins, International Journal of Inorganic Materials 3 (2001) 1211.
83. Nunes P, Femandes B, Fortunato E, Martins R. Thin Solid Films, 1998;333:1.
84. Takashi Ogi, Darmawan Hidayat, Ferry Iskandar, Agus Purwanto, Kikuo Okuyama, Advanced Powder Technology 20 (2009) 203.
85. Xuhu Yua, Jin Maa, Feng Jia, Yuheng Wanga, Xijian Zhanga, Chuanfu Chengb, Honglei Ma, Applied Surface Science 239 (2005) 222.
86. E. Fortunato, V. Assuncao , A. Goncalves, A. Marques, H. Aguas, L. Pereira, I. Ferreira, P. Vilarinho, R. Martins, Thin Solid Films 451-452 (2004) 443.
87. E. Fortunato , L.Raniero, L.Silva, A.Gonc-alves, A.Pimentel, P.Barquinha,H.Aguas, L.Pereira, G. Gonc-alves, I.Ferreira, E.Elangovan, R.Martins, Solar Energy Materials & Solar Cells 92 (2008) 1605.