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Volumn 245, Issue 1-4, 2005, Pages 310-315

Thickness dependence of properties of ZnO:Ga films deposited by rf magnetron sputtering

Author keywords

Electrical and optical properties; Film thickness; Magnetron sputtering; ZnO:Ga

Indexed keywords

ELECTRIC CONDUCTIVITY; GALLIUM; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; SUBSTRATES; THICKNESS MEASUREMENT; ZINC OXIDE;

EID: 17044384177     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.10.022     Document Type: Article
Times cited : (119)

References (16)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.