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Volumn 245, Issue 1-4, 2005, Pages 310-315
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Thickness dependence of properties of ZnO:Ga films deposited by rf magnetron sputtering
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Author keywords
Electrical and optical properties; Film thickness; Magnetron sputtering; ZnO:Ga
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Indexed keywords
ELECTRIC CONDUCTIVITY;
GALLIUM;
MAGNETRON SPUTTERING;
OPTICAL PROPERTIES;
SUBSTRATES;
THICKNESS MEASUREMENT;
ZINC OXIDE;
ELECTRICAL AND OPTICAL PROPERTIES;
FILM THICKNESS;
WURTZITE;
ZNO:GA;
THIN FILMS;
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EID: 17044384177
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2004.10.022 Document Type: Article |
Times cited : (119)
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References (16)
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