Influence of annealing on the properties of ZnO:Ga films prepared by radio frequency magnetron sputtering

Thin Solid Films

Volumn 483, Issue 1-2, 2005, Pages 296-300

  Yu, Xuhu ^a   Ma, Jin ^a   Ji, Feng ^a   Wang, Yuheng ^a   Zhang, Xijian ^a   Ma, Honglei ^a  

^a SHANDONG UNIVERSITY   (China)

Author keywords

Annealing; Electrical properties and measurement; Sputtering; Zinc oxide

Indexed keywords

ANNEALING; DOPING (ADDITIVES); MAGNETRON SPUTTERING; SOL-GELS; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

CONDUCTION BANDS; GLASS SUBSTRATES; POST-ANNEALING TREATMENT; SUBSTRATES TEMPERATURE;

ZINC OXIDE;

EID: 18844447989     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.01.013     Document Type: Article

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