The properties of transparent conductive In-Ga-Zn oxide films produced by pulsed laser deposition

Vacuum

Volumn 83, Issue 3, 2008, Pages 552-556

  Inoue, Kenichi ^a   Tominaga, Kikuo ^a   Tsuduki, Takashi ^a   Mikawa, Michio ^b   Moriga, Toshihiro ^a  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

^b NATIONAL INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Amorphous; PLD; TCO films; Wide band gap

Indexed keywords

CONDUCTIVE FILMS; GALLIUM; PULSED LASER APPLICATIONS; PULSED LASER DEPOSITION; ZINC;

AMORPHOUS; PLD; TCO FILMS; VISIBLE RANGE; WIDE BAND GAP;

OXIDE FILMS;

EID: 52949144543     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.04.066     Document Type: Article

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