Effects of oxygen partial pressure on doping properties of Ga-doped ZnO films prepared by ion-plating with traveling substrate

Surface and Coatings Technology

Volumn 201, Issue 7 SPEC. ISS., 2006, Pages 4004-4007

  Yamada, T ^a   Ikeda, K ^a   Kishimoto, S ^a   Makino, H ^a   Yamamoto, T ^a  

^a KOCHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Ga; Ion plating; ZnO

Indexed keywords

CARRIER CONCENTRATION; ELECTRIC PROPERTIES; GALLIUM; OXYGEN; PARTIAL PRESSURE; SEMICONDUCTOR DOPING; SOLUBILITY;

CRYSTALLINITY; HALL MOBILITY; ION-PLATING;

ZINC OXIDE;

CARRIER CONCENTRATION; ELECTRIC PROPERTIES; GALLIUM; OXYGEN; PARTIAL PRESSURE; SEMICONDUCTOR DOPING; SOLUBILITY; ZINC OXIDE;

EID: 33751240488     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.08.019     Document Type: Article

References (13)

1. Nishii J., Hossain F.M., Takagi S., Aita T., Saikusa K., Ohmaki Y., Ohkubo I., Kishimoto S., Ohtomo A., Fukumura T., Matsukura F., Ohno Y., Koinuma H., Ohno H., and Kawasaki M. Jpn. J. Appl. Phys. 42 (2003) L347
2. Tabuchi K., Wenas W.W., Yamada A., Konagai M., and Takahashi K. Jpn. J. Appl. Phys. 32 (1993) 3764
3. Yoshino M., Wenas W.W., Yamada A., Konagai M., and Takahashi K. Jpn. J. Appl. Phys. 32 (1993) 726
4. Sang B., Yamada A., and Konagai M. Jpn. J. Appl. Phys. 37 (1998) L206
5. Jiang H., Yoneyama K., Minagawa H., Mizuno S., Kadowaki T., Matsudaira K., Tochihara H., Hayakawa K., and Watanabe M. Jpn. J. Appl. Phys. 32 (1993) L806
6. Fortunato E., Gonçalves A., Assunção V., Marques A., Águas H., Pereira L., Ferreira I., and Martins R. Thin Solid Films 442 (2003) 121
7. Yu X., Ma J., Ji F., Wang Y., Zhang X., Cheng C., and Ma H. Appl. Surf. Sci. 239 (2005) 222
8. Hirasawa H., Yoshida M., Nakamura S., Suzuki Y., Okada S., and Kondo K. Sol. Energy Mater. Sol. Cells 67 (2001) 231
9. Minami T., Ida S., and Miyata T. Thin Solid Films 416 (2002) 92
10. Minami T., Ida S., Miyata T., and Minamino Y. Thin Solid Films 445 (2003) 268
11. Iwata K., Sakemi T., Yamada A., Fons P., Awai K., Yamamoto T., Matsubara M., Tampo H., and Niki S. Thin Solid Films 445 (2003) 274
12. Yamamoto T., Sakemi T., Awai K., and Shirakata S. Thin Solid Films 451-452 (2004) 439
13. Osada M., Sakemi T., and Yamamoto T. Thin Solid Films 494 (2006) 38